FIGURES OF MERIT FOR SPUTTERED SUPERLATTICES.

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

Two figures of merit for sputtered superlattices (FMSS) are proposed which allow a comparison of the quality of artificial superlattices prepared in different sputtering systems. These FMSS also demonstrate several conditions for optimizing the sputtering parameters which are not widely appreciated.

Original languageEnglish (US)
Pages (from-to)1218-1219
Number of pages2
JournalJournal of Applied Physics
Volume56
Issue number4
DOIs
StatePublished - Jan 1 1984

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figure of merit
superlattices
sputtering

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Physics and Astronomy (miscellaneous)

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FIGURES OF MERIT FOR SPUTTERED SUPERLATTICES. / Falco, Charles M.

In: Journal of Applied Physics, Vol. 56, No. 4, 01.01.1984, p. 1218-1219.

Research output: Contribution to journalArticle

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