Figures of merit for sputtered superlattices

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10 Scopus citations


Two figures of merit for sputtered superlattices (FMSS) are proposed which allow a comparison of the quality of artificial superlattices prepared in different sputtering systems. These FMSS also demonstrate several conditions for optimizing the sputtering parameters which are not widely appreciated.

Original languageEnglish (US)
Pages (from-to)1218-1219
Number of pages2
JournalJournal of Applied Physics
Issue number4
StatePublished - 1984

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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