Figures of merit for sputtered superlattices

Research output: Contribution to journalArticle

10 Scopus citations

Abstract

Two figures of merit for sputtered superlattices (FMSS) are proposed which allow a comparison of the quality of artificial superlattices prepared in different sputtering systems. These FMSS also demonstrate several conditions for optimizing the sputtering parameters which are not widely appreciated.

Original languageEnglish (US)
Pages (from-to)1218-1219
Number of pages2
JournalJournal of Applied Physics
Volume56
Issue number4
DOIs
StatePublished - Dec 1 1984

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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