Fizeau interferometry for large convex surfaces

Research output: Chapter in Book/Report/Conference proceedingConference contribution

39 Scopus citations

Abstract

Measurements of large convex surfaces are notoriously difficult because they require auxiliary optics that are larger than the surface being tested. Fizeau interferometry is well suited for these surfaces because the only surface required to be made to high accuracy is the concave reference surface, which is only slightly larger than the surface being measured. Convex surfaces which are spherical or aspheric can be measured using spherical, aspherical, or holographic test plates. The reference surfaces for these tests must be of good quality and measured to high accuracy. The optical systems that provide illumination and create an image of the interference pattern do not have to be made to high quality. The illumination systems can typically have errors several orders of magnitude larger than the allowable surface measurement errors, so these systems can be made at low cost. Several such systems using low cost aspheric mirrors and lenses for measuring convex spherical and aspherical surfaces are presented.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Pages127-138
Number of pages12
StatePublished - Dec 1 1995
EventOptical Manufacturing and Testing - San Diego, CA, USA
Duration: Jul 9 1995Jul 11 1995

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume2536
ISSN (Print)0277-786X

Other

OtherOptical Manufacturing and Testing
CitySan Diego, CA, USA
Period7/9/957/11/95

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Burge, J. H. (1995). Fizeau interferometry for large convex surfaces. In Proceedings of SPIE - The International Society for Optical Engineering (pp. 127-138). (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2536).