Flexible micro-optics fabrication by direct laser writing toward CMOS compatible 3D optical circuit

Chris Summitt, Sunglin Wang, Lee Johnson, Melissa Zaverton, Tom Milster, Yuzuru Takashima

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations

Abstract

We demonstrated a 45 degree micro mirror by a direct laser writing method. A flat, smooth and clearly defined mirror surface has been fabricated despite of the finite size and long tail of the point spread function of the exposure tool.

Original languageEnglish (US)
Title of host publicationAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics VI
DOIs
StatePublished - May 29 2013
EventAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics VI - San Francisco, CA, United States
Duration: Feb 5 2013Feb 6 2013

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8613
ISSN (Print)0277-786X

Other

OtherAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics VI
CountryUnited States
CitySan Francisco, CA
Period2/5/132/6/13

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Summitt, C., Wang, S., Johnson, L., Zaverton, M., Milster, T., & Takashima, Y. (2013). Flexible micro-optics fabrication by direct laser writing toward CMOS compatible 3D optical circuit. In Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI [86130K] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8613). https://doi.org/10.1117/12.2004996