Fluid flows in microchannels with cavities

Zeta Tak For Yu, Yi Kuen Lee, Man Wong, Yitshak Zohar

Research output: Contribution to journalArticle

24 Citations (Scopus)

Abstract

Pressure-driven gas and liquid flows through microchannels with cavities have been studied using both experimental measurements and numerical computations. Several microchannels with cavities varying in shape, number and dimensions have been fabricated. One set of microdevices, integrated with sensors on a silicon wafer, is used for flow rate and pressure distribution measurements in gas flows. Another set of microdevices, fabricated using glass-to-silicon wafer bonding, is utilized for visualization of liquid flow patterns. The cavity effect on the flow in the microchannel is found to be very small, with the mass flow rate increasing slightly with increasing number of cavities. The flow pattern in the cavity depends on two control parameters; it is fully attached only if both the reduced Reynolds number and the cavity number are small. A flow regime map has been constructed, where the critical values for the transition from attached to separated flow are determined. The numerical computations reveal another control parameter, the cavity aspect ratio. The now in the cavity is similar only if all three control parameters are the same. Finally, the vorticity distribution and related circulation in the cavity are analyzed.

Original languageEnglish (US)
Pages (from-to)1386-1398
Number of pages13
JournalJournal of Microelectromechanical Systems
Volume14
Issue number6
DOIs
StatePublished - Dec 2005

Fingerprint

Microchannels
Flow of fluids
Silicon wafers
Flow patterns
Flow rate
Wafer bonding
Liquids
Vorticity
Pressure distribution
Flow of gases
Aspect ratio
Reynolds number
Visualization
Glass
Sensors
Gases

Keywords

  • Micro vortex
  • Microcavity flow
  • Microscale flow separation
  • Reduced Reynolds number

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Fluid flows in microchannels with cavities. / Yu, Zeta Tak For; Lee, Yi Kuen; Wong, Man; Zohar, Yitshak.

In: Journal of Microelectromechanical Systems, Vol. 14, No. 6, 12.2005, p. 1386-1398.

Research output: Contribution to journalArticle

Yu, Zeta Tak For ; Lee, Yi Kuen ; Wong, Man ; Zohar, Yitshak. / Fluid flows in microchannels with cavities. In: Journal of Microelectromechanical Systems. 2005 ; Vol. 14, No. 6. pp. 1386-1398.
@article{9d4c0e478ecf46f9ab408e5ac92dacfe,
title = "Fluid flows in microchannels with cavities",
abstract = "Pressure-driven gas and liquid flows through microchannels with cavities have been studied using both experimental measurements and numerical computations. Several microchannels with cavities varying in shape, number and dimensions have been fabricated. One set of microdevices, integrated with sensors on a silicon wafer, is used for flow rate and pressure distribution measurements in gas flows. Another set of microdevices, fabricated using glass-to-silicon wafer bonding, is utilized for visualization of liquid flow patterns. The cavity effect on the flow in the microchannel is found to be very small, with the mass flow rate increasing slightly with increasing number of cavities. The flow pattern in the cavity depends on two control parameters; it is fully attached only if both the reduced Reynolds number and the cavity number are small. A flow regime map has been constructed, where the critical values for the transition from attached to separated flow are determined. The numerical computations reveal another control parameter, the cavity aspect ratio. The now in the cavity is similar only if all three control parameters are the same. Finally, the vorticity distribution and related circulation in the cavity are analyzed.",
keywords = "Micro vortex, Microcavity flow, Microscale flow separation, Reduced Reynolds number",
author = "Yu, {Zeta Tak For} and Lee, {Yi Kuen} and Man Wong and Yitshak Zohar",
year = "2005",
month = "12",
doi = "10.1109/JMEMS.2005.859086",
language = "English (US)",
volume = "14",
pages = "1386--1398",
journal = "Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "6",

}

TY - JOUR

T1 - Fluid flows in microchannels with cavities

AU - Yu, Zeta Tak For

AU - Lee, Yi Kuen

AU - Wong, Man

AU - Zohar, Yitshak

PY - 2005/12

Y1 - 2005/12

N2 - Pressure-driven gas and liquid flows through microchannels with cavities have been studied using both experimental measurements and numerical computations. Several microchannels with cavities varying in shape, number and dimensions have been fabricated. One set of microdevices, integrated with sensors on a silicon wafer, is used for flow rate and pressure distribution measurements in gas flows. Another set of microdevices, fabricated using glass-to-silicon wafer bonding, is utilized for visualization of liquid flow patterns. The cavity effect on the flow in the microchannel is found to be very small, with the mass flow rate increasing slightly with increasing number of cavities. The flow pattern in the cavity depends on two control parameters; it is fully attached only if both the reduced Reynolds number and the cavity number are small. A flow regime map has been constructed, where the critical values for the transition from attached to separated flow are determined. The numerical computations reveal another control parameter, the cavity aspect ratio. The now in the cavity is similar only if all three control parameters are the same. Finally, the vorticity distribution and related circulation in the cavity are analyzed.

AB - Pressure-driven gas and liquid flows through microchannels with cavities have been studied using both experimental measurements and numerical computations. Several microchannels with cavities varying in shape, number and dimensions have been fabricated. One set of microdevices, integrated with sensors on a silicon wafer, is used for flow rate and pressure distribution measurements in gas flows. Another set of microdevices, fabricated using glass-to-silicon wafer bonding, is utilized for visualization of liquid flow patterns. The cavity effect on the flow in the microchannel is found to be very small, with the mass flow rate increasing slightly with increasing number of cavities. The flow pattern in the cavity depends on two control parameters; it is fully attached only if both the reduced Reynolds number and the cavity number are small. A flow regime map has been constructed, where the critical values for the transition from attached to separated flow are determined. The numerical computations reveal another control parameter, the cavity aspect ratio. The now in the cavity is similar only if all three control parameters are the same. Finally, the vorticity distribution and related circulation in the cavity are analyzed.

KW - Micro vortex

KW - Microcavity flow

KW - Microscale flow separation

KW - Reduced Reynolds number

UR - http://www.scopus.com/inward/record.url?scp=29244489224&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=29244489224&partnerID=8YFLogxK

U2 - 10.1109/JMEMS.2005.859086

DO - 10.1109/JMEMS.2005.859086

M3 - Article

AN - SCOPUS:29244489224

VL - 14

SP - 1386

EP - 1398

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 6

ER -