Focused ion beam lithography of multiperiod gratings for a wavelength-division-multiplexed transmitter laser array

I. M. Templeton, M. Fallahi, L. E. Erickson, F. Chatenoud, E. S. Koteles, H. G. Champion, J. J. He, R. Barber

Research output: Contribution to journalArticle

5 Scopus citations

Abstract

This paper demonstrates the design, construction, and performance of a monolithically integrated wavelength-division-multiplexed transmitter module having ten distributed-Bragg-reflector (DBR) laser diodes operating at predefined frequencies in the 0.98μm to 1.0μm range with a frequency separation of about 2nm. The DBR gratings are written by focused ion beam lithography with manual stepping of the x-deflection gain to produce the required variation of period.

Original languageEnglish (US)
Pages (from-to)2722-2724
Number of pages3
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume13
Issue number6
DOIs
StatePublished - Nov 1 1995
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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