Focused ion beam lithography of multiperiod gratings for a wavelength-division-multiplexed transmitter laser array

I. M. Templeton, Mahmoud Fallahi, L. E. Erickson, F. Chatenoud, E. S. Koteles, H. G. Champion, J. J. He, R. Barber

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Abstract

This paper demonstrates the design, construction, and performance of a monolithically integrated wavelength-division-multiplexed transmitter module having ten distributed-Bragg-reflector (DBR) laser diodes operating at predefined frequencies in the 0.98μm to 1.0μm range with a frequency separation of about 2nm. The DBR gratings are written by focused ion beam lithography with manual stepping of the x-deflection gain to produce the required variation of period.

Original languageEnglish (US)
Pages (from-to)2722-2724
Number of pages3
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume13
Issue number6
DOIs
Publication statusPublished - Nov 1995
Externally publishedYes

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ASJC Scopus subject areas

  • Engineering(all)

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