Freeform diffractive structure writing through maskless lithography

Lee Johnson, Melissa Zaverton, Tyler Hashimoto, Alex Felli, Young Sik Kim, Thomas D Milster

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Printing of diffractive structures on 3D surfaces has been demonstrated using focal adjustment during i-line maskless lithography. A diffractive pupil for asymmetric astrometric distortion correction was fabricated on spherical mirrors with diameters up to 50mm.

Original languageEnglish (US)
Title of host publicationLaser Science, LS 2014
PublisherOptical Society of America (OSA)
ISBN (Print)1557522863
Publication statusPublished - Oct 14 2014
EventLaser Science, LS 2014 - Tucson, United States
Duration: Oct 19 2014Oct 23 2014

Other

OtherLaser Science, LS 2014
CountryUnited States
CityTucson
Period10/19/1410/23/14

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Johnson, L., Zaverton, M., Hashimoto, T., Felli, A., Kim, Y. S., & Milster, T. D. (2014). Freeform diffractive structure writing through maskless lithography. In Laser Science, LS 2014 Optical Society of America (OSA).