Frequency response of TiNi shape memory alloy thin film micro-actuators

C. C. Ma, R. Wang, Q. P. Sun, Y. Zohar, M. Wong

Research output: Contribution to conferencePaper

16 Scopus citations

Abstract

Relatively independent of the physical dimensions of micro-actuators based on shape memory alloys (SMA), the reported frequency response typically is capped at a few tens of Hz. The slow response agrees well with that of the rotating micro-actuators fabricated in this work. On the other hand, based on heat transfer analyses, a theoretical response time on the order of a few milli-seconds should be possible for scaled micro-actuators, thus implying a frequency performance of at least a few hundred Hz. Therefore it is concluded that the response of SMA micro-actuators may not be limited by heat transfer, but by the slow rate of phase transformation between the austenitic and the martensitic phases. This is consistent with the slow phase growth rate of about 0.3 μm/s observed using in-situ transmission electron microscopy.

Original languageEnglish (US)
Pages370-374
Number of pages5
StatePublished - Jan 1 2000
Externally publishedYes
Event13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn
Duration: Jan 23 2000Jan 27 2000

Other

Other13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)
CityMiyazaki, Jpn
Period1/23/001/27/00

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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    Ma, C. C., Wang, R., Sun, Q. P., Zohar, Y., & Wong, M. (2000). Frequency response of TiNi shape memory alloy thin film micro-actuators. 370-374. Paper presented at 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000), Miyazaki, Jpn, .