Fringe-print-through error analysis and correction in snapshot phase-shifting interference microscope

Yu Zhang, Xiaobo Tian, Rongguang Liang

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

To reduce the environmental errors, a snapshot phase-shifting interference microscope (SPSIM) has been developed for surface roughness measurement. However, fringe-print-through (FPT) error widely exists in the phase-shifting interferometry (PSI). To ensure the measurement accuracy, we analyze the sources which introduce the FPT error in the SPSIM. We also develop a FPT error correction algorithm which can be used in the different intensity distribution conditions. The simulation and experiment verify the correctness and feasibility of the FPT error correction algorithm.

Original languageEnglish (US)
Pages (from-to)26554-26566
Number of pages13
JournalOptics Express
Volume25
Issue number22
DOIs
StatePublished - Oct 30 2017

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error analysis
microscopes
interference
surface roughness
interferometry
simulation

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Fringe-print-through error analysis and correction in snapshot phase-shifting interference microscope. / Zhang, Yu; Tian, Xiaobo; Liang, Rongguang.

In: Optics Express, Vol. 25, No. 22, 30.10.2017, p. 26554-26566.

Research output: Contribution to journalArticle

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