Fundamentals of moisture interaction with EP stainless steel and silicon wafer surfaces

Eric Shero, Ce Ma, Farhang Shadman

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

A model for the outgassing of metal oxide surfaces with multilayers of adsorbed moisture is presented. A brief background on the state of adsorption and desorption modeling and possible experimental pitfalls is also contained. The dynamic model is consistent with the BET multimolecular model at equilibrium.

Original languageEnglish (US)
Title of host publicationInstitute of Environmental Sciences - Proceedings, Annual Technical Meeting
PublisherInst of Environmental Sciences
Pages542-548
Number of pages7
StatePublished - 1995
EventProceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences - Anaheim, CA, USA
Duration: Apr 30 1995May 5 1995

Other

OtherProceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences
CityAnaheim, CA, USA
Period4/30/955/5/95

Fingerprint

Silicon wafers
Moisture
Stainless steel
Degassing
Dynamic models
Desorption
Multilayers
Adsorption
Oxides
Metals

ASJC Scopus subject areas

  • Environmental Engineering

Cite this

Shero, E., Ma, C., & Shadman, F. (1995). Fundamentals of moisture interaction with EP stainless steel and silicon wafer surfaces. In Institute of Environmental Sciences - Proceedings, Annual Technical Meeting (pp. 542-548). Inst of Environmental Sciences.

Fundamentals of moisture interaction with EP stainless steel and silicon wafer surfaces. / Shero, Eric; Ma, Ce; Shadman, Farhang.

Institute of Environmental Sciences - Proceedings, Annual Technical Meeting. Inst of Environmental Sciences, 1995. p. 542-548.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Shero, E, Ma, C & Shadman, F 1995, Fundamentals of moisture interaction with EP stainless steel and silicon wafer surfaces. in Institute of Environmental Sciences - Proceedings, Annual Technical Meeting. Inst of Environmental Sciences, pp. 542-548, Proceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences, Anaheim, CA, USA, 4/30/95.
Shero E, Ma C, Shadman F. Fundamentals of moisture interaction with EP stainless steel and silicon wafer surfaces. In Institute of Environmental Sciences - Proceedings, Annual Technical Meeting. Inst of Environmental Sciences. 1995. p. 542-548
Shero, Eric ; Ma, Ce ; Shadman, Farhang. / Fundamentals of moisture interaction with EP stainless steel and silicon wafer surfaces. Institute of Environmental Sciences - Proceedings, Annual Technical Meeting. Inst of Environmental Sciences, 1995. pp. 542-548
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