Fundamentals of moisture interaction with EP stainless steel and silicon wafer surfaces

Eric Shero, Ce Ma, Farhang Shadman

Research output: Contribution to journalConference article

4 Scopus citations

Abstract

A model for the outgassing of metal oxide surfaces with multilayers of adsorbed moisture is presented. A brief background on the state of adsorption and desorption modeling and possible experimental pitfalls is also contained. The dynamic model is consistent with the BET multimolecular model at equilibrium.

Original languageEnglish (US)
Pages (from-to)542-548
Number of pages7
JournalInstitute of Environmental Sciences - Proceedings, Annual Technical Meeting
StatePublished - Dec 1 1995
EventProceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences - Anaheim, CA, USA
Duration: Apr 30 1995May 5 1995

ASJC Scopus subject areas

  • Environmental Engineering

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