Fundamentals of moisture interaction with EP stainless steel and silicon wafer surfaces

Eric Shero; Ce Ma; Farhang Shadman

Fundamentals of moisture interaction with EP stainless steel and silicon wafer surfaces

Eric Shero, Ce Ma, Farhang Shadman

Chemical and Environmental Engineering

Research output: Contribution to journal › Conference article › peer-review

4 Scopus citations

Abstract

A model for the outgassing of metal oxide surfaces with multilayers of adsorbed moisture is presented. A brief background on the state of adsorption and desorption modeling and possible experimental pitfalls is also contained. The dynamic model is consistent with the BET multimolecular model at equilibrium.

Original language	English (US)
Pages (from-to)	542-548
Number of pages	7
Journal	Institute of Environmental Sciences - Proceedings, Annual Technical Meeting
State	Published - Dec 1 1995
Event	Proceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences - Anaheim, CA, USA Duration: Apr 30 1995 → May 5 1995

ASJC Scopus subject areas

Environmental Engineering

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title = "Fundamentals of moisture interaction with EP stainless steel and silicon wafer surfaces",

abstract = "A model for the outgassing of metal oxide surfaces with multilayers of adsorbed moisture is presented. A brief background on the state of adsorption and desorption modeling and possible experimental pitfalls is also contained. The dynamic model is consistent with the BET multimolecular model at equilibrium.",

author = "Eric Shero and Ce Ma and Farhang Shadman",

year = "1995",

month = dec,

day = "1",

language = "English (US)",

pages = "542--548",

journal = "Institute of Environmental Sciences - Proceedings, Annual Technical Meeting",

issn = "0073-9227",

note = "Proceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences ; Conference date: 30-04-1995 Through 05-05-1995",

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TY - JOUR

T1 - Fundamentals of moisture interaction with EP stainless steel and silicon wafer surfaces

AU - Shero, Eric

AU - Ma, Ce

AU - Shadman, Farhang

PY - 1995/12/1

Y1 - 1995/12/1

N2 - A model for the outgassing of metal oxide surfaces with multilayers of adsorbed moisture is presented. A brief background on the state of adsorption and desorption modeling and possible experimental pitfalls is also contained. The dynamic model is consistent with the BET multimolecular model at equilibrium.

AB - A model for the outgassing of metal oxide surfaces with multilayers of adsorbed moisture is presented. A brief background on the state of adsorption and desorption modeling and possible experimental pitfalls is also contained. The dynamic model is consistent with the BET multimolecular model at equilibrium.

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UR - http://www.scopus.com/inward/citedby.url?scp=0029546783&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0029546783

SP - 542

EP - 548

JO - Institute of Environmental Sciences - Proceedings, Annual Technical Meeting

JF - Institute of Environmental Sciences - Proceedings, Annual Technical Meeting

SN - 0073-9227

T2 - Proceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences

Y2 - 30 April 1995 through 5 May 1995

ER -