GaAs photonic crystal slab nanocavities

Growth, fabrication, and quality factor

J. Sweet, B. C. Richards, J. D. Olitzky, J. Hendrickson, Galina Khitrova, H. M. Gibbs, D. Litvinov, D. Gerthsen, D. Z. Hu, D. M. Schaadt, M. Wegener, U. Khankhoje, A. Scherer

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

In an effort to understand why short wavelength (∼1000 nm) GaAs-based photonic crystal slab nanocavities have much lower quality factors (Q) than predicted (and observed in Si), many samples were grown, fabricated into nanocavities, and studied by atomic force, transmission electron, and scanning electron microscopy as well as optical spectroscopy. The top surface of the AlGaAs sacrificial layer can be rough even when the top of the slab is smooth; growth conditions are reported that reduce the AlGaAs roughness by an order of magnitude, but this had little effect on Q. The removal of the sacrificial layer by hydrogen fluoride can leave behind a residue; potassium hydroxide completely removes the residue, resulting in higher Qs.

Original languageEnglish (US)
Pages (from-to)1-6
Number of pages6
JournalPhotonics and Nanostructures - Fundamentals and Applications
Volume8
Issue number1
DOIs
StatePublished - Jan 2010

Fingerprint

Hydrofluoric Acid
Potassium hydroxide
Photonic crystals
aluminum gallium arsenides
Q factors
slabs
Surface roughness
photonics
Fabrication
potassium hydroxides
Wavelength
Hydrogen
Scanning electron microscopy
fabrication
Electrons
hydrofluoric acid
crystals
roughness
scanning electron microscopy
wavelengths

Keywords

  • Integrated optics devices
  • Microcavities
  • Nanostructure fabrication
  • Photonic crystals
  • Photonic integrated circuits

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Hardware and Architecture
  • Condensed Matter Physics
  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials

Cite this

GaAs photonic crystal slab nanocavities : Growth, fabrication, and quality factor. / Sweet, J.; Richards, B. C.; Olitzky, J. D.; Hendrickson, J.; Khitrova, Galina; Gibbs, H. M.; Litvinov, D.; Gerthsen, D.; Hu, D. Z.; Schaadt, D. M.; Wegener, M.; Khankhoje, U.; Scherer, A.

In: Photonics and Nanostructures - Fundamentals and Applications, Vol. 8, No. 1, 01.2010, p. 1-6.

Research output: Contribution to journalArticle

Sweet, J, Richards, BC, Olitzky, JD, Hendrickson, J, Khitrova, G, Gibbs, HM, Litvinov, D, Gerthsen, D, Hu, DZ, Schaadt, DM, Wegener, M, Khankhoje, U & Scherer, A 2010, 'GaAs photonic crystal slab nanocavities: Growth, fabrication, and quality factor', Photonics and Nanostructures - Fundamentals and Applications, vol. 8, no. 1, pp. 1-6. https://doi.org/10.1016/j.photonics.2009.10.004
Sweet, J. ; Richards, B. C. ; Olitzky, J. D. ; Hendrickson, J. ; Khitrova, Galina ; Gibbs, H. M. ; Litvinov, D. ; Gerthsen, D. ; Hu, D. Z. ; Schaadt, D. M. ; Wegener, M. ; Khankhoje, U. ; Scherer, A. / GaAs photonic crystal slab nanocavities : Growth, fabrication, and quality factor. In: Photonics and Nanostructures - Fundamentals and Applications. 2010 ; Vol. 8, No. 1. pp. 1-6.
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