GaP solid immersion lens based on diffraction

Youngsik Kim, Jun Zhang, Tom D. Milster

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

A hybrid solid immersion lens system (SIL) is described, in which a spherical glass cap lens, a micro gallium phosphide (micro-GaP) SIL and a diffractive optical element (DOE) are combined. Fabrication and aberration correction mechanisms are discussed.

Original languageEnglish (US)
Article number03A047
JournalJapanese Journal of Applied Physics
Volume48
Issue number3 PART 2
DOIs
StatePublished - Mar 1 2009

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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