Gas flow in a microdevice with a mixing layer configuration

Sylvanus Yuk Kwan Lee, Zeta Tak For Yu, Man Wong, Yitshak Zohar

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

We have designed an integrated microsystem with a mixing layer configuration, fabricated using standard micromachining techniques, in order to study fluid flows, in complex microfluidic systems, that are certain to find numerous important applications, especially in biomedical or chemical analysis. The device features two narrow and parallel channels merging smoothly into a wide channel downstream of a splitter plate, all 1 μm in height, integrated with distributed pressure sensors. The characterization of the device included measurements of flow rate and pressure distribution for single-phase gas flow. Argon gas was passed either through one of the inlet channels, while the other was blocked, or through both inlet channels. Simple flow models of either a single straight microchannel or a pair of microchannels with different widths, connected in series, have been found to provide reasonable predictions of the evolving flow fields.

Original languageEnglish (US)
Pages (from-to)96-102
Number of pages7
JournalJournal of Micromechanics and Microengineering
Volume12
Issue number1
DOIs
StatePublished - Jan 2002
Externally publishedYes

Fingerprint

Microchannels
gas flow
Flow of gases
Argon
Microsystems
Micromachining
Pressure sensors
configurations
microchannels
Merging
Microfluidics
Pressure distribution
Flow of fluids
Flow fields
Gases
Flow rate
pressure sensors
micromachining
Chemical analysis
chemical analysis

ASJC Scopus subject areas

  • Instrumentation
  • Materials Science(all)
  • Mechanics of Materials
  • Computational Mechanics

Cite this

Gas flow in a microdevice with a mixing layer configuration. / Lee, Sylvanus Yuk Kwan; Yu, Zeta Tak For; Wong, Man; Zohar, Yitshak.

In: Journal of Micromechanics and Microengineering, Vol. 12, No. 1, 01.2002, p. 96-102.

Research output: Contribution to journalArticle

Lee, Sylvanus Yuk Kwan ; Yu, Zeta Tak For ; Wong, Man ; Zohar, Yitshak. / Gas flow in a microdevice with a mixing layer configuration. In: Journal of Micromechanics and Microengineering. 2002 ; Vol. 12, No. 1. pp. 96-102.
@article{6251e982d377413b86ae0b75c357f8e6,
title = "Gas flow in a microdevice with a mixing layer configuration",
abstract = "We have designed an integrated microsystem with a mixing layer configuration, fabricated using standard micromachining techniques, in order to study fluid flows, in complex microfluidic systems, that are certain to find numerous important applications, especially in biomedical or chemical analysis. The device features two narrow and parallel channels merging smoothly into a wide channel downstream of a splitter plate, all 1 μm in height, integrated with distributed pressure sensors. The characterization of the device included measurements of flow rate and pressure distribution for single-phase gas flow. Argon gas was passed either through one of the inlet channels, while the other was blocked, or through both inlet channels. Simple flow models of either a single straight microchannel or a pair of microchannels with different widths, connected in series, have been found to provide reasonable predictions of the evolving flow fields.",
author = "Lee, {Sylvanus Yuk Kwan} and Yu, {Zeta Tak For} and Man Wong and Yitshak Zohar",
year = "2002",
month = "1",
doi = "10.1088/0960-1317/12/1/315",
language = "English (US)",
volume = "12",
pages = "96--102",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "IOP Publishing Ltd.",
number = "1",

}

TY - JOUR

T1 - Gas flow in a microdevice with a mixing layer configuration

AU - Lee, Sylvanus Yuk Kwan

AU - Yu, Zeta Tak For

AU - Wong, Man

AU - Zohar, Yitshak

PY - 2002/1

Y1 - 2002/1

N2 - We have designed an integrated microsystem with a mixing layer configuration, fabricated using standard micromachining techniques, in order to study fluid flows, in complex microfluidic systems, that are certain to find numerous important applications, especially in biomedical or chemical analysis. The device features two narrow and parallel channels merging smoothly into a wide channel downstream of a splitter plate, all 1 μm in height, integrated with distributed pressure sensors. The characterization of the device included measurements of flow rate and pressure distribution for single-phase gas flow. Argon gas was passed either through one of the inlet channels, while the other was blocked, or through both inlet channels. Simple flow models of either a single straight microchannel or a pair of microchannels with different widths, connected in series, have been found to provide reasonable predictions of the evolving flow fields.

AB - We have designed an integrated microsystem with a mixing layer configuration, fabricated using standard micromachining techniques, in order to study fluid flows, in complex microfluidic systems, that are certain to find numerous important applications, especially in biomedical or chemical analysis. The device features two narrow and parallel channels merging smoothly into a wide channel downstream of a splitter plate, all 1 μm in height, integrated with distributed pressure sensors. The characterization of the device included measurements of flow rate and pressure distribution for single-phase gas flow. Argon gas was passed either through one of the inlet channels, while the other was blocked, or through both inlet channels. Simple flow models of either a single straight microchannel or a pair of microchannels with different widths, connected in series, have been found to provide reasonable predictions of the evolving flow fields.

UR - http://www.scopus.com/inward/record.url?scp=0036153068&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0036153068&partnerID=8YFLogxK

U2 - 10.1088/0960-1317/12/1/315

DO - 10.1088/0960-1317/12/1/315

M3 - Article

VL - 12

SP - 96

EP - 102

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 1

ER -