Gas-phase Wafer Cleaning Technology

Jeffery W. Butterbaugh, Anthony J. Muscat

Research output: Chapter in Book/Report/Conference proceedingChapter

5 Scopus citations
Original languageEnglish (US)
Title of host publicationHandbook of Silicon Wafer Cleaning Technology
Subtitle of host publicationSecond Edition
PublisherElsevier Inc.
Pages269-353
Number of pages85
ISBN (Electronic)9780815517733
ISBN (Print)9780815515548
DOIs
StatePublished - Jan 10 2008

ASJC Scopus subject areas

  • Engineering(all)

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