General testing method for refractive surfaces based on reverse Hartmann test

Ping Xu, Daodang Wang, Zhidong Gong, Zhongmin Xie, Rongguang Liang, Ming Kong, Jun Zhao, Linhai Mo, Shuhui Mo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The testing technique with high dynamic range is required to meet the measurement of refractive wavefront with large distortion from test refractive surface. A general deflectometric method based on reverse Hartmann test is proposed to test refractive surfaces. Ray tracing of the modeled testing system is performed to reconstruct the refractive wavefront from test surface, in which computer-aided optimization of system geometry is performed to calibrate the geometrical error. For the refractive wavefront error with RMS 255 μm, the testing precision better than 0.5 μm is achieved.

Original languageEnglish (US)
Title of host publicationApplied Optical Metrology II
PublisherSPIE
Volume10373
ISBN (Electronic)9781510612037
DOIs
StatePublished - Jan 1 2017
EventApplied Optical Metrology II 2017 - San Diego, United States
Duration: Aug 8 2017Aug 9 2017

Other

OtherApplied Optical Metrology II 2017
CountryUnited States
CitySan Diego
Period8/8/178/9/17

Fingerprint

Wavefronts
Reverse
Wave Front
Testing
Ray tracing
High Dynamic Range
Ray Tracing
Geometry
Optimization
ray tracing
dynamic range
optimization
geometry

Keywords

  • ray tracing
  • refractive surface testing
  • reverse Hartmann test
  • total internal reflection

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Xu, P., Wang, D., Gong, Z., Xie, Z., Liang, R., Kong, M., ... Mo, S. (2017). General testing method for refractive surfaces based on reverse Hartmann test. In Applied Optical Metrology II (Vol. 10373). [103730J] SPIE. https://doi.org/10.1117/12.2273189

General testing method for refractive surfaces based on reverse Hartmann test. / Xu, Ping; Wang, Daodang; Gong, Zhidong; Xie, Zhongmin; Liang, Rongguang; Kong, Ming; Zhao, Jun; Mo, Linhai; Mo, Shuhui.

Applied Optical Metrology II. Vol. 10373 SPIE, 2017. 103730J.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Xu, P, Wang, D, Gong, Z, Xie, Z, Liang, R, Kong, M, Zhao, J, Mo, L & Mo, S 2017, General testing method for refractive surfaces based on reverse Hartmann test. in Applied Optical Metrology II. vol. 10373, 103730J, SPIE, Applied Optical Metrology II 2017, San Diego, United States, 8/8/17. https://doi.org/10.1117/12.2273189
Xu P, Wang D, Gong Z, Xie Z, Liang R, Kong M et al. General testing method for refractive surfaces based on reverse Hartmann test. In Applied Optical Metrology II. Vol. 10373. SPIE. 2017. 103730J https://doi.org/10.1117/12.2273189
Xu, Ping ; Wang, Daodang ; Gong, Zhidong ; Xie, Zhongmin ; Liang, Rongguang ; Kong, Ming ; Zhao, Jun ; Mo, Linhai ; Mo, Shuhui. / General testing method for refractive surfaces based on reverse Hartmann test. Applied Optical Metrology II. Vol. 10373 SPIE, 2017.
@inproceedings{29e8c232130e4c3f94eb7a384049e3e1,
title = "General testing method for refractive surfaces based on reverse Hartmann test",
abstract = "The testing technique with high dynamic range is required to meet the measurement of refractive wavefront with large distortion from test refractive surface. A general deflectometric method based on reverse Hartmann test is proposed to test refractive surfaces. Ray tracing of the modeled testing system is performed to reconstruct the refractive wavefront from test surface, in which computer-aided optimization of system geometry is performed to calibrate the geometrical error. For the refractive wavefront error with RMS 255 μm, the testing precision better than 0.5 μm is achieved.",
keywords = "ray tracing, refractive surface testing, reverse Hartmann test, total internal reflection",
author = "Ping Xu and Daodang Wang and Zhidong Gong and Zhongmin Xie and Rongguang Liang and Ming Kong and Jun Zhao and Linhai Mo and Shuhui Mo",
year = "2017",
month = "1",
day = "1",
doi = "10.1117/12.2273189",
language = "English (US)",
volume = "10373",
booktitle = "Applied Optical Metrology II",
publisher = "SPIE",
address = "United States",

}

TY - GEN

T1 - General testing method for refractive surfaces based on reverse Hartmann test

AU - Xu, Ping

AU - Wang, Daodang

AU - Gong, Zhidong

AU - Xie, Zhongmin

AU - Liang, Rongguang

AU - Kong, Ming

AU - Zhao, Jun

AU - Mo, Linhai

AU - Mo, Shuhui

PY - 2017/1/1

Y1 - 2017/1/1

N2 - The testing technique with high dynamic range is required to meet the measurement of refractive wavefront with large distortion from test refractive surface. A general deflectometric method based on reverse Hartmann test is proposed to test refractive surfaces. Ray tracing of the modeled testing system is performed to reconstruct the refractive wavefront from test surface, in which computer-aided optimization of system geometry is performed to calibrate the geometrical error. For the refractive wavefront error with RMS 255 μm, the testing precision better than 0.5 μm is achieved.

AB - The testing technique with high dynamic range is required to meet the measurement of refractive wavefront with large distortion from test refractive surface. A general deflectometric method based on reverse Hartmann test is proposed to test refractive surfaces. Ray tracing of the modeled testing system is performed to reconstruct the refractive wavefront from test surface, in which computer-aided optimization of system geometry is performed to calibrate the geometrical error. For the refractive wavefront error with RMS 255 μm, the testing precision better than 0.5 μm is achieved.

KW - ray tracing

KW - refractive surface testing

KW - reverse Hartmann test

KW - total internal reflection

UR - http://www.scopus.com/inward/record.url?scp=85039075373&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85039075373&partnerID=8YFLogxK

U2 - 10.1117/12.2273189

DO - 10.1117/12.2273189

M3 - Conference contribution

AN - SCOPUS:85039075373

VL - 10373

BT - Applied Optical Metrology II

PB - SPIE

ER -