General testing method for refractive surfaces based on reverse Hartmann test

Ping Xu, Daodang Wang, Zhidong Gong, Zhongmin Xie, Rongguang Liang, Ming Kong, Jun Zhao, Linhai Mo, Shuhui Mo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

The testing technique with high dynamic range is required to meet the measurement of refractive wavefront with large distortion from test refractive surface. A general deflectometric method based on reverse Hartmann test is proposed to test refractive surfaces. Ray tracing of the modeled testing system is performed to reconstruct the refractive wavefront from test surface, in which computer-aided optimization of system geometry is performed to calibrate the geometrical error. For the refractive wavefront error with RMS 255 μm, the testing precision better than 0.5 μm is achieved.

Original languageEnglish (US)
Title of host publicationApplied Optical Metrology II
EditorsJames D. Trolinger, Erik Novak
PublisherSPIE
ISBN (Electronic)9781510612037
DOIs
StatePublished - 2017
EventApplied Optical Metrology II 2017 - San Diego, United States
Duration: Aug 8 2017Aug 9 2017

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume10373
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherApplied Optical Metrology II 2017
CountryUnited States
CitySan Diego
Period8/8/178/9/17

Keywords

  • ray tracing
  • refractive surface testing
  • reverse Hartmann test
  • total internal reflection

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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