Geometrical analysis of third-order aberrations for a solid immersion lens

Matthew Lang, Eric Aspnes, Tom D. Milster

Research output: Contribution to journalArticle

14 Scopus citations

Abstract

This paper gives a treatment for finding 3rd order aberrations in solid-immersion lenses (SILs) using spherical-aberration as the basis for a polynomial power expansion of the wavefront. Unlike previous work, the treatment is general for any incident and lens media, for any lens thickness, and for any chief-ray specification. Using this treatment, a tolerance analysis is given with emphasis on thickness tolerance and limitations on field of view. Major findings include tight thickness tolerance for high-index hyperhemispheres and a tolerance window for hemispheres centered about a thickness less than the radius of curvature of the lens.

Original languageEnglish (US)
Pages (from-to)20008-20028
Number of pages21
JournalOptics Express
Volume16
Issue number24
DOIs
StatePublished - Nov 24 2008

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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