Abstract
In the fringe-illumination deflectometry based on reverse-Hartmann-test configuration, ray tracing of the modeled testing system is performed to reconstruct the test surface error. Careful calibration of system geometry is required to achieve high testing accuracy. To realize the high-precision surface testing with reverse Hartmann test, a computer-aided geometrical error calibration method is proposed. The aberrations corresponding to various geometrical errors are studied. With the aberration weights for various geometrical errors, the computer-aided optimization of system geometry with iterative ray tracing is carried out to calibration the geometrical error, and the accuracy in the order of subnanometer is achieved.
| Original language | English (US) |
|---|---|
| Title of host publication | Applied Optical Metrology II |
| Publisher | SPIE |
| Volume | 10373 |
| ISBN (Electronic) | 9781510612037 |
| DOIs | |
| State | Published - Jan 1 2017 |
| Event | Applied Optical Metrology II 2017 - San Diego, United States Duration: Aug 8 2017 → Aug 9 2017 |
Other
| Other | Applied Optical Metrology II 2017 |
|---|---|
| Country | United States |
| City | San Diego |
| Period | 8/8/17 → 8/9/17 |
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Keywords
- computer-aided optimization
- deflectometrygeometrical error calibration
- surface testing
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering
Cite this
Geometrical error calibration in reflective surface testing based on reverse Hartmann test. / Gong, Zhidong; Wang, Daodang; Xu, Ping; Wang, Chao; Liang, Rongguang; Kong, Ming; Zhao, Jun; Mo, Linhai; Mo, Shuhui.
Applied Optical Metrology II. Vol. 10373 SPIE, 2017. 103730K.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Geometrical error calibration in reflective surface testing based on reverse Hartmann test
AU - Gong, Zhidong
AU - Wang, Daodang
AU - Xu, Ping
AU - Wang, Chao
AU - Liang, Rongguang
AU - Kong, Ming
AU - Zhao, Jun
AU - Mo, Linhai
AU - Mo, Shuhui
PY - 2017/1/1
Y1 - 2017/1/1
N2 - In the fringe-illumination deflectometry based on reverse-Hartmann-test configuration, ray tracing of the modeled testing system is performed to reconstruct the test surface error. Careful calibration of system geometry is required to achieve high testing accuracy. To realize the high-precision surface testing with reverse Hartmann test, a computer-aided geometrical error calibration method is proposed. The aberrations corresponding to various geometrical errors are studied. With the aberration weights for various geometrical errors, the computer-aided optimization of system geometry with iterative ray tracing is carried out to calibration the geometrical error, and the accuracy in the order of subnanometer is achieved.
AB - In the fringe-illumination deflectometry based on reverse-Hartmann-test configuration, ray tracing of the modeled testing system is performed to reconstruct the test surface error. Careful calibration of system geometry is required to achieve high testing accuracy. To realize the high-precision surface testing with reverse Hartmann test, a computer-aided geometrical error calibration method is proposed. The aberrations corresponding to various geometrical errors are studied. With the aberration weights for various geometrical errors, the computer-aided optimization of system geometry with iterative ray tracing is carried out to calibration the geometrical error, and the accuracy in the order of subnanometer is achieved.
KW - computer-aided optimization
KW - deflectometrygeometrical error calibration
KW - surface testing
UR - http://www.scopus.com/inward/record.url?scp=85039073589&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85039073589&partnerID=8YFLogxK
U2 - 10.1117/12.2268372
DO - 10.1117/12.2268372
M3 - Conference contribution
AN - SCOPUS:85039073589
VL - 10373
BT - Applied Optical Metrology II
PB - SPIE
ER -