Geometrical error calibration in reflective surface testing based on reverse Hartmann test

Zhidong Gong; Daodang Wang; Ping Xu; Chao Wang; Rongguang Liang; Ming Kong; Jun Zhao; Linhai Mo; Shuhui Mo

doi:10.1117/12.2268372

Geometrical error calibration in reflective surface testing based on reverse Hartmann test

Zhidong Gong, Daodang Wang, Ping Xu, Chao Wang, Rongguang Liang, Ming Kong, Jun Zhao, Linhai Mo, Shuhui Mo

Optical Sciences, College of

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

In the fringe-illumination deflectometry based on reverse-Hartmann-test configuration, ray tracing of the modeled testing system is performed to reconstruct the test surface error. Careful calibration of system geometry is required to achieve high testing accuracy. To realize the high-precision surface testing with reverse Hartmann test, a computer-aided geometrical error calibration method is proposed. The aberrations corresponding to various geometrical errors are studied. With the aberration weights for various geometrical errors, the computer-aided optimization of system geometry with iterative ray tracing is carried out to calibration the geometrical error, and the accuracy in the order of subnanometer is achieved.

Original language	English (US)
Title of host publication	Applied Optical Metrology II
Editors	James D. Trolinger, Erik Novak
Publisher	SPIE
ISBN (Electronic)	9781510612037
DOIs	https://doi.org/10.1117/12.2268372
State	Published - 2017
Event	Applied Optical Metrology II 2017 - San Diego, United States Duration: Aug 8 2017 → Aug 9 2017

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	10373
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Other

Other	Applied Optical Metrology II 2017
Country	United States
City	San Diego
Period	8/8/17 → 8/9/17

Keywords

computer-aided optimization
deflectometrygeometrical error calibration
surface testing

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.2268372

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Cite this

Gong, Z., Wang, D., Xu, P., Wang, C., Liang, R., Kong, M., Zhao, J., Mo, L., & Mo, S. (2017). Geometrical error calibration in reflective surface testing based on reverse Hartmann test. In J. D. Trolinger, & E. Novak (Eds.), Applied Optical Metrology II [103730K] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10373). SPIE. https://doi.org/10.1117/12.2268372

Geometrical error calibration in reflective surface testing based on reverse Hartmann test. / Gong, Zhidong; Wang, Daodang; Xu, Ping; Wang, Chao; Liang, Rongguang; Kong, Ming; Zhao, Jun; Mo, Linhai; Mo, Shuhui.

Applied Optical Metrology II. ed. / James D. Trolinger; Erik Novak. SPIE, 2017. 103730K (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10373).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Gong, Z, Wang, D, Xu, P, Wang, C, Liang, R, Kong, M, Zhao, J, Mo, L & Mo, S 2017, Geometrical error calibration in reflective surface testing based on reverse Hartmann test. in JD Trolinger & E Novak (eds), Applied Optical Metrology II., 103730K, Proceedings of SPIE - The International Society for Optical Engineering, vol. 10373, SPIE, Applied Optical Metrology II 2017, San Diego, United States, 8/8/17. https://doi.org/10.1117/12.2268372

Gong, Zhidong ; Wang, Daodang ; Xu, Ping ; Wang, Chao ; Liang, Rongguang ; Kong, Ming ; Zhao, Jun ; Mo, Linhai ; Mo, Shuhui. / Geometrical error calibration in reflective surface testing based on reverse Hartmann test. Applied Optical Metrology II. editor / James D. Trolinger ; Erik Novak. SPIE, 2017. (Proceedings of SPIE - The International Society for Optical Engineering).

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abstract = "In the fringe-illumination deflectometry based on reverse-Hartmann-test configuration, ray tracing of the modeled testing system is performed to reconstruct the test surface error. Careful calibration of system geometry is required to achieve high testing accuracy. To realize the high-precision surface testing with reverse Hartmann test, a computer-aided geometrical error calibration method is proposed. The aberrations corresponding to various geometrical errors are studied. With the aberration weights for various geometrical errors, the computer-aided optimization of system geometry with iterative ray tracing is carried out to calibration the geometrical error, and the accuracy in the order of subnanometer is achieved.",

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