Geometrical error calibration in reflective surface testing based on reverse Hartmann test

Zhidong Gong, Daodang Wang, Ping Xu, Chao Wang, Rongguang Liang, Ming Kong, Jun Zhao, Linhai Mo, Shuhui Mo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

In the fringe-illumination deflectometry based on reverse-Hartmann-test configuration, ray tracing of the modeled testing system is performed to reconstruct the test surface error. Careful calibration of system geometry is required to achieve high testing accuracy. To realize the high-precision surface testing with reverse Hartmann test, a computer-aided geometrical error calibration method is proposed. The aberrations corresponding to various geometrical errors are studied. With the aberration weights for various geometrical errors, the computer-aided optimization of system geometry with iterative ray tracing is carried out to calibration the geometrical error, and the accuracy in the order of subnanometer is achieved.

Original languageEnglish (US)
Title of host publicationApplied Optical Metrology II
PublisherSPIE
Volume10373
ISBN (Electronic)9781510612037
DOIs
Publication statusPublished - Jan 1 2017
EventApplied Optical Metrology II 2017 - San Diego, United States
Duration: Aug 8 2017Aug 9 2017

Other

OtherApplied Optical Metrology II 2017
CountryUnited States
CitySan Diego
Period8/8/178/9/17

    Fingerprint

Keywords

  • computer-aided optimization
  • deflectometrygeometrical error calibration
  • surface testing

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Gong, Z., Wang, D., Xu, P., Wang, C., Liang, R., Kong, M., ... Mo, S. (2017). Geometrical error calibration in reflective surface testing based on reverse Hartmann test. In Applied Optical Metrology II (Vol. 10373). [103730K] SPIE. https://doi.org/10.1117/12.2268372