GeO2SiO2 thin films for planar waveguide applications

Din Guo Chen, B. G. Potter, J. H. Simmons

Research output: Contribution to journalArticle

48 Scopus citations

Abstract

Various thin films of germanium silicate glass with high germania content have been fabricated by a sol-gel method. After densification, these films have a high optical quality and can be used as planar waveguides. The densification behavior of these films was studied by measurements of the index of refraction, as a function of heat treatment temperatures, using ellipsometry. The relationship of refractive index versus GeO2 content follows the additive Lorentz-Lorenz model. Waveguiding Raman spectroscopy suggested the formation of SiOGe linkages in these films without phase segregation. Various waveguide propagation characteristics, at 632.8 nm, were studied using a prism coupling technique. The propagation loss rate of a 50GeO250SiO2 glass waveguide was measured as 3.31 dB/cm.

Original languageEnglish (US)
Pages (from-to)135-147
Number of pages13
JournalJournal of Non-Crystalline Solids
Volume178
Issue numberC
DOIs
StatePublished - Nov 3 1994
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Materials Chemistry

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