Growth dynamics at a metal-metal interface

Wayne R. Bennett, J. A. Leavitt, Charles M Falco

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

A determination of the sticking coefficient of sputter-deposited metal films on freshly deposited metal surfaces is described in detail. The systems investigated were Mo deposited on Ta and Ta on Mo. Also described is a detailed determination of the structure of Mo-Ta interfaces using Rutherford backscattering spectrometry and a combination of x-ray diffraction techniques. Within a few angstroms of each interface we find that the lattice is stretched in the growth direction and has an excess of defects relative to the bulk lattice. We also find that Mo/Ta superlattices fabricated with wavelengths in the range 20 to 120 A exhibit structural coherence extending over a number of superlattice layers.

Original languageEnglish (US)
Pages (from-to)4199-4204
Number of pages6
JournalPhysical Review B
Volume35
Issue number9
DOIs
StatePublished - 1987

Fingerprint

Metals
Superlattices
Rutherford backscattering spectroscopy
metal films
Crystal lattices
metals
Spectrometry
metal surfaces
superlattices
backscattering
x ray diffraction
Diffraction
X rays
Wavelength
Defects
defects
coefficients
wavelengths
spectroscopy
Direction compound

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Growth dynamics at a metal-metal interface. / Bennett, Wayne R.; Leavitt, J. A.; Falco, Charles M.

In: Physical Review B, Vol. 35, No. 9, 1987, p. 4199-4204.

Research output: Contribution to journalArticle

Bennett, Wayne R. ; Leavitt, J. A. ; Falco, Charles M. / Growth dynamics at a metal-metal interface. In: Physical Review B. 1987 ; Vol. 35, No. 9. pp. 4199-4204.
@article{17bc66b93e95443a83d29fff15e177fc,
title = "Growth dynamics at a metal-metal interface",
abstract = "A determination of the sticking coefficient of sputter-deposited metal films on freshly deposited metal surfaces is described in detail. The systems investigated were Mo deposited on Ta and Ta on Mo. Also described is a detailed determination of the structure of Mo-Ta interfaces using Rutherford backscattering spectrometry and a combination of x-ray diffraction techniques. Within a few angstroms of each interface we find that the lattice is stretched in the growth direction and has an excess of defects relative to the bulk lattice. We also find that Mo/Ta superlattices fabricated with wavelengths in the range 20 to 120 A exhibit structural coherence extending over a number of superlattice layers.",
author = "Bennett, {Wayne R.} and Leavitt, {J. A.} and Falco, {Charles M}",
year = "1987",
doi = "10.1103/PhysRevB.35.4199",
language = "English (US)",
volume = "35",
pages = "4199--4204",
journal = "Physical Review B-Condensed Matter",
issn = "0163-1829",
publisher = "American Institute of Physics Publising LLC",
number = "9",

}

TY - JOUR

T1 - Growth dynamics at a metal-metal interface

AU - Bennett, Wayne R.

AU - Leavitt, J. A.

AU - Falco, Charles M

PY - 1987

Y1 - 1987

N2 - A determination of the sticking coefficient of sputter-deposited metal films on freshly deposited metal surfaces is described in detail. The systems investigated were Mo deposited on Ta and Ta on Mo. Also described is a detailed determination of the structure of Mo-Ta interfaces using Rutherford backscattering spectrometry and a combination of x-ray diffraction techniques. Within a few angstroms of each interface we find that the lattice is stretched in the growth direction and has an excess of defects relative to the bulk lattice. We also find that Mo/Ta superlattices fabricated with wavelengths in the range 20 to 120 A exhibit structural coherence extending over a number of superlattice layers.

AB - A determination of the sticking coefficient of sputter-deposited metal films on freshly deposited metal surfaces is described in detail. The systems investigated were Mo deposited on Ta and Ta on Mo. Also described is a detailed determination of the structure of Mo-Ta interfaces using Rutherford backscattering spectrometry and a combination of x-ray diffraction techniques. Within a few angstroms of each interface we find that the lattice is stretched in the growth direction and has an excess of defects relative to the bulk lattice. We also find that Mo/Ta superlattices fabricated with wavelengths in the range 20 to 120 A exhibit structural coherence extending over a number of superlattice layers.

UR - http://www.scopus.com/inward/record.url?scp=4243410720&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=4243410720&partnerID=8YFLogxK

U2 - 10.1103/PhysRevB.35.4199

DO - 10.1103/PhysRevB.35.4199

M3 - Article

AN - SCOPUS:4243410720

VL - 35

SP - 4199

EP - 4204

JO - Physical Review B-Condensed Matter

JF - Physical Review B-Condensed Matter

SN - 0163-1829

IS - 9

ER -