A determination of the sticking coefficient of sputter-deposited metal films on freshly deposited metal surfaces is described in detail. The systems investigated were Mo deposited on Ta and Ta on Mo. Also described is a detailed determination of the structure of Mo-Ta interfaces using Rutherford backscattering spectrometry and a combination of x-ray diffraction techniques. Within a few angstroms of each interface we find that the lattice is stretched in the growth direction and has an excess of defects relative to the bulk lattice. We also find that Mo/Ta superlattices fabricated with wavelengths in the range 20 to 120 A exhibit structural coherence extending over a number of superlattice layers.
ASJC Scopus subject areas
- Condensed Matter Physics