High-accuracy aspheric x-ray mirror metrology using Software Configurable Optical Test System/deflectometry

Run Huang, Peng Su, James H Burge, Lei Huang, Mourad Idir

Research output: Contribution to journalArticle

27 Citations (Scopus)

Abstract

The Software Configurable Optical Test System (SCOTS) uses deflectometry to measure surface slopes of general optical shapes without the need for additional null optics. Careful alignment of test geometry and calibration of inherent system error improve the accuracy of SCOTS to a level where it competes with interferometry. We report a SCOTS surface measurement of an off-axis superpolished elliptical x-ray mirror that achieves <1 nm root-mean-square accuracy for the surface measurement with low-order term included.

Original languageEnglish (US)
Article number084103
JournalOptical Engineering
Volume54
Issue number8
DOIs
StatePublished - Aug 1 2015

Fingerprint

Surface measurement
metrology
Mirrors
mirrors
computer programs
X rays
Interferometry
Optics
x rays
Calibration
Geometry
interferometry
alignment
optics
slopes
geometry

Keywords

  • calibration
  • deflectometry
  • interferometry
  • metrology
  • optics
  • x-ray optics

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering(all)

Cite this

High-accuracy aspheric x-ray mirror metrology using Software Configurable Optical Test System/deflectometry. / Huang, Run; Su, Peng; Burge, James H; Huang, Lei; Idir, Mourad.

In: Optical Engineering, Vol. 54, No. 8, 084103, 01.08.2015.

Research output: Contribution to journalArticle

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