High-accuracy deflectometric microscope system with a large slope range

Hanting Gu, Daodang Wang, Zhixiong Gu, Ming Kong, Lu Liu, Lihua Lei, Rongguang Liang

Research output: Contribution to journalArticlepeer-review

Abstract

We propose an off-axis deflectometric microscope system for microscopic surface testing with both high measurement accuracy and a large slope dynamic range. A high-luminance liquid crystal display directly illuminates the tested sample with coded fringes, and then the reflected fringes passing through a microscope objective are captured by a pinhole camera, from which the deflectometric microscopic testing with a large slope range can be achieved. The accuracy of the proposed system is validated numerically and experimentally, and a large measurable slope dynamic range is also demonstrated. The proposed system provides a feasible way with the slope range in the order of sub-radians and sag resolution better than 0.05 nm.

Original languageEnglish (US)
Pages (from-to)2011-2014
Number of pages4
JournalOptics letters
Volume46
Issue number9
DOIs
StatePublished - May 1 2021

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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