High NA pupil plane image polarimetry for detection of surface and subsurface damage in optical materials

Victor Densmore, Youngsik Kim, Geon Hee Kim, Tom D. Milster

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A high-NA solid immersion lens microscope in conjunction with polarization modulated pupil plane imaging is investigated as a means for surface and subsurface damage detection in optical materials.

Original languageEnglish (US)
Title of host publicationFrontiers in Optics, FiO 2014
PublisherOptical Society of America (OSA)
ISBN (Electronic)1557522863
DOIs
StatePublished - Oct 14 2014

Publication series

NameFrontiers in Optics, FiO 2014

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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