HIGH PRECISION ANGLE MEASUREMENTS OFF SMALL SURFACES.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

A method is described for measuring the orientation of small plane surfaces several tens of micrometers on a side with a resolution of several seconds of arc. A laser beam waist is located on the test surface which underfills the surface. The reflected beam is detected by a quadrant detector to determine the offset of the beam from its nominal position. This displacement determines the relative angular difference from a predetermined angular standard. Advantages of this method for precise angle determination are the ability to measure small surfaces, insensitivity to translations of the test piece, large test piece clearance for inaccessible surfaces, and compensation for laser drift.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsJames C. Wyant
PublisherSPIE
Pages148-152
Number of pages5
ISBN (Print)0892524642
StatePublished - Dec 1 1983

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume429
ISSN (Print)0277-786X

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Chipman, R. A. (1983). HIGH PRECISION ANGLE MEASUREMENTS OFF SMALL SURFACES. In J. C. Wyant (Ed.), Proceedings of SPIE - The International Society for Optical Engineering (pp. 148-152). (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 429). SPIE.