High-quality crystallinity controlled ALD TiO2 for waveguiding applications

Tapani Alasaarela, Lasse Karvonen, Henri Jussila, Antti Säynätjoki, Soroush Mehravar, Robert A. Norwood, Nasser Peyghambarian, Khanh Kieu, Ilkka Tittonen, Harri Lipsanen

Research output: Contribution to journalArticlepeer-review

21 Scopus citations

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Physics & Astronomy