High quality low-dose low-energy SIMOX implanted in high current oxygen implanter

M. J. Anc, M. Farley, J. Jiao, S. Seraphin, J. Kirchhoff, P. J. McMarr, H. L. Hughes

Research output: Contribution to conferencePaperpeer-review

2 Scopus citations

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Engineering & Materials Science

Chemical Compounds