High-resolution imaging system using a tabletop extreme ultraviolet source

Xiaoshi Zhang, Daisy Raymondson, Arvinder Singh Sandhu, Sterling Backus, Yanwei Liu, David T. Attwood, Margaret M. Murnane, Henry C. Kapteyn, Ariel R. Libertun

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We present a simple setup for obtaining high resolution, sub-micron images using high harmonic generation (HHG) in a hollow-core waveguide as a light source. We demonstrate imaging with illumination at a wavelength of 30 nm using an all-reflective, double-multilayer mirror setup and a CCD camera as a recording device. For the magnifications of up to 50x used here, the all-reflective setup has advantages over zone plate microscopes because of the much larger working distances that allow for imaging of plasmas. This setup has also a throughput that is higher by at least a factor of three compared to zone-plate microscopes, and presents the additional advantage of preserving the temporal pulse width of the harmonics because diffractive optics are not used. This work demonstrates the feasibility of high-spatial-resolution, time-resolved, EUV imaging of plasmas and other objects using a tabletop compact light source.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsS.G. Biedron, W. Eberhardt, T. Ishikawa, R.O. Tatchyn
Pages47-52
Number of pages6
Volume5534
DOIs
StatePublished - 2004
Externally publishedYes
EventFourth Generation X-Ray Sources and Optics II - Denver, CO, United States
Duration: Aug 2 2004Aug 3 2004

Other

OtherFourth Generation X-Ray Sources and Optics II
CountryUnited States
CityDenver, CO
Period8/2/048/3/04

Fingerprint

Imaging systems
Imaging techniques
Light sources
high resolution
Microscopes
Diffractive optics
Plasmas
light sources
microscopes
Harmonic generation
CCD cameras
diffractive optics
Multilayers
Mirrors
Waveguides
Lighting
magnification
Throughput
preserving
hollow

Keywords

  • EUV imaging
  • EUV microscopy
  • HHG
  • High Harmonic applications
  • Imaging
  • Time resolved EUV imaging
  • Time resolved plasma dynamics

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Zhang, X., Raymondson, D., Sandhu, A. S., Backus, S., Liu, Y., Attwood, D. T., ... Libertun, A. R. (2004). High-resolution imaging system using a tabletop extreme ultraviolet source. In S. G. Biedron, W. Eberhardt, T. Ishikawa, & R. O. Tatchyn (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 5534, pp. 47-52). [06] https://doi.org/10.1117/12.557379

High-resolution imaging system using a tabletop extreme ultraviolet source. / Zhang, Xiaoshi; Raymondson, Daisy; Sandhu, Arvinder Singh; Backus, Sterling; Liu, Yanwei; Attwood, David T.; Murnane, Margaret M.; Kapteyn, Henry C.; Libertun, Ariel R.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / S.G. Biedron; W. Eberhardt; T. Ishikawa; R.O. Tatchyn. Vol. 5534 2004. p. 47-52 06.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Zhang, X, Raymondson, D, Sandhu, AS, Backus, S, Liu, Y, Attwood, DT, Murnane, MM, Kapteyn, HC & Libertun, AR 2004, High-resolution imaging system using a tabletop extreme ultraviolet source. in SG Biedron, W Eberhardt, T Ishikawa & RO Tatchyn (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 5534, 06, pp. 47-52, Fourth Generation X-Ray Sources and Optics II, Denver, CO, United States, 8/2/04. https://doi.org/10.1117/12.557379
Zhang X, Raymondson D, Sandhu AS, Backus S, Liu Y, Attwood DT et al. High-resolution imaging system using a tabletop extreme ultraviolet source. In Biedron SG, Eberhardt W, Ishikawa T, Tatchyn RO, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 5534. 2004. p. 47-52. 06 https://doi.org/10.1117/12.557379
Zhang, Xiaoshi ; Raymondson, Daisy ; Sandhu, Arvinder Singh ; Backus, Sterling ; Liu, Yanwei ; Attwood, David T. ; Murnane, Margaret M. ; Kapteyn, Henry C. ; Libertun, Ariel R. / High-resolution imaging system using a tabletop extreme ultraviolet source. Proceedings of SPIE - The International Society for Optical Engineering. editor / S.G. Biedron ; W. Eberhardt ; T. Ishikawa ; R.O. Tatchyn. Vol. 5534 2004. pp. 47-52
@inproceedings{5604edd284894cc6a75d0cbf138bc43a,
title = "High-resolution imaging system using a tabletop extreme ultraviolet source",
abstract = "We present a simple setup for obtaining high resolution, sub-micron images using high harmonic generation (HHG) in a hollow-core waveguide as a light source. We demonstrate imaging with illumination at a wavelength of 30 nm using an all-reflective, double-multilayer mirror setup and a CCD camera as a recording device. For the magnifications of up to 50x used here, the all-reflective setup has advantages over zone plate microscopes because of the much larger working distances that allow for imaging of plasmas. This setup has also a throughput that is higher by at least a factor of three compared to zone-plate microscopes, and presents the additional advantage of preserving the temporal pulse width of the harmonics because diffractive optics are not used. This work demonstrates the feasibility of high-spatial-resolution, time-resolved, EUV imaging of plasmas and other objects using a tabletop compact light source.",
keywords = "EUV imaging, EUV microscopy, HHG, High Harmonic applications, Imaging, Time resolved EUV imaging, Time resolved plasma dynamics",
author = "Xiaoshi Zhang and Daisy Raymondson and Sandhu, {Arvinder Singh} and Sterling Backus and Yanwei Liu and Attwood, {David T.} and Murnane, {Margaret M.} and Kapteyn, {Henry C.} and Libertun, {Ariel R.}",
year = "2004",
doi = "10.1117/12.557379",
language = "English (US)",
volume = "5534",
pages = "47--52",
editor = "S.G. Biedron and W. Eberhardt and T. Ishikawa and R.O. Tatchyn",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

}

TY - GEN

T1 - High-resolution imaging system using a tabletop extreme ultraviolet source

AU - Zhang, Xiaoshi

AU - Raymondson, Daisy

AU - Sandhu, Arvinder Singh

AU - Backus, Sterling

AU - Liu, Yanwei

AU - Attwood, David T.

AU - Murnane, Margaret M.

AU - Kapteyn, Henry C.

AU - Libertun, Ariel R.

PY - 2004

Y1 - 2004

N2 - We present a simple setup for obtaining high resolution, sub-micron images using high harmonic generation (HHG) in a hollow-core waveguide as a light source. We demonstrate imaging with illumination at a wavelength of 30 nm using an all-reflective, double-multilayer mirror setup and a CCD camera as a recording device. For the magnifications of up to 50x used here, the all-reflective setup has advantages over zone plate microscopes because of the much larger working distances that allow for imaging of plasmas. This setup has also a throughput that is higher by at least a factor of three compared to zone-plate microscopes, and presents the additional advantage of preserving the temporal pulse width of the harmonics because diffractive optics are not used. This work demonstrates the feasibility of high-spatial-resolution, time-resolved, EUV imaging of plasmas and other objects using a tabletop compact light source.

AB - We present a simple setup for obtaining high resolution, sub-micron images using high harmonic generation (HHG) in a hollow-core waveguide as a light source. We demonstrate imaging with illumination at a wavelength of 30 nm using an all-reflective, double-multilayer mirror setup and a CCD camera as a recording device. For the magnifications of up to 50x used here, the all-reflective setup has advantages over zone plate microscopes because of the much larger working distances that allow for imaging of plasmas. This setup has also a throughput that is higher by at least a factor of three compared to zone-plate microscopes, and presents the additional advantage of preserving the temporal pulse width of the harmonics because diffractive optics are not used. This work demonstrates the feasibility of high-spatial-resolution, time-resolved, EUV imaging of plasmas and other objects using a tabletop compact light source.

KW - EUV imaging

KW - EUV microscopy

KW - HHG

KW - High Harmonic applications

KW - Imaging

KW - Time resolved EUV imaging

KW - Time resolved plasma dynamics

UR - http://www.scopus.com/inward/record.url?scp=15744381418&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=15744381418&partnerID=8YFLogxK

U2 - 10.1117/12.557379

DO - 10.1117/12.557379

M3 - Conference contribution

VL - 5534

SP - 47

EP - 52

BT - Proceedings of SPIE - The International Society for Optical Engineering

A2 - Biedron, S.G.

A2 - Eberhardt, W.

A2 - Ishikawa, T.

A2 - Tatchyn, R.O.

ER -