A near-field subsurface (100 μm) microscope with numerical aperture (NA) = 2:45 is developed for integrated circuit (IC) inspection by using silicon solid immersion lenses (SIL). It is optimized for imaging patterns underneath the surface (around 100 μm deep). With the illumination light at 1.2 μm, a lateral resolution of better than 300nm is experimentally demonstrated. Gap control and tilt servos are suggested for the possibility of dynamic imaging.
ASJC Scopus subject areas
- Physics and Astronomy(all)