High-speed 3-D optical metrology and applications

Song Zhang, Rongguang Liang, Lianxiang Yang

Research output: Contribution to journalArticle

Original languageEnglish (US)
Article number112201
JournalOptical Engineering
Volume53
Issue number11
DOIs
StatePublished - Nov 1 2014

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metrology
high speed

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering(all)

Cite this

High-speed 3-D optical metrology and applications. / Zhang, Song; Liang, Rongguang; Yang, Lianxiang.

In: Optical Engineering, Vol. 53, No. 11, 112201, 01.11.2014.

Research output: Contribution to journalArticle

Zhang, Song ; Liang, Rongguang ; Yang, Lianxiang. / High-speed 3-D optical metrology and applications. In: Optical Engineering. 2014 ; Vol. 53, No. 11.
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