High-speed inline profiler using a modified Fourier transform method for measuring integrated circuit surface profiles

Takeshi Nakazawa, Jose Sasian, Francy K. Abraham

Research output: Contribution to journalArticle

1 Scopus citations

Abstract

We propose a high-speed surface profiler using a modified Fourier transform profilometry (FTP) approach. Our system geometry is different from a conventional profiler in that the fringe-projection lens and the imaging lens are at different heights from a reference plane. FTP computer simulation and experimental data are provided that supports our theoretical development. Our profiler provides a 1σ rms error of about 4 μm for an integrated circuit chip sample in an area of 14 mm × 6.5 mm with a 0.13 second data acquisition time. It is shown that our theoretical derivation is suitable for a micrometer scale object measurement.

Original languageEnglish (US)
Article number053603
JournalOptical Engineering
Volume50
Issue number5
DOIs
StatePublished - May 1 2011

Keywords

  • 3D shape measurement
  • Fourier transform profilometry
  • machine vision

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering(all)

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