High-speed inline profiler using a modified Fourier transform method for measuring integrated circuit surface profiles

Takeshi Nakazawa, Jose M Sasian, Francy K. Abraham

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

We propose a high-speed surface profiler using a modified Fourier transform profilometry (FTP) approach. Our system geometry is different from a conventional profiler in that the fringe-projection lens and the imaging lens are at different heights from a reference plane. FTP computer simulation and experimental data are provided that supports our theoretical development. Our profiler provides a 1σ rms error of about 4 μm for an integrated circuit chip sample in an area of 14 mm × 6.5 mm with a 0.13 second data acquisition time. It is shown that our theoretical derivation is suitable for a micrometer scale object measurement.

Original languageEnglish (US)
Article number053603
JournalOptical Engineering
Volume50
Issue number5
DOIs
StatePublished - May 2011

Fingerprint

Profilometry
integrated circuits
Integrated circuits
Lenses
Fourier transforms
lenses
high speed
profiles
data acquisition
micrometers
Data acquisition
derivation
computerized simulation
projection
chips
Imaging techniques
Geometry
Computer simulation
geometry

Keywords

  • 3D shape measurement
  • Fourier transform profilometry
  • machine vision

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering(all)

Cite this

High-speed inline profiler using a modified Fourier transform method for measuring integrated circuit surface profiles. / Nakazawa, Takeshi; Sasian, Jose M; Abraham, Francy K.

In: Optical Engineering, Vol. 50, No. 5, 053603, 05.2011.

Research output: Contribution to journalArticle

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