High-throughput fabrication of sub-micron pillar arrays for free-solution DNA electrophoresis without e-beam lithography

Yick Chuen Chan, Yi Kuen Lee, Man Wong, Yitshak Zohar

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

A new technology approach for the design, fabrication and application of an integrated free-solution electrophoresis microsystem is presented. The technology approach, which utilizes the dual-photolithography provided from a stepper and a contact aligner, allows fast and flexible formation of sub-micron pillar array patterns on a silicon substrate. Combining with standard microfabrication technique and deep-reactive-ion-etching (DRIE), very high aspect-ratio sub-micron pillar arrays can be integrated in regular microfluidic system for free-solution DNA electrophoresis. DNA interaction with pillars inside the microsystem has been demonstrated, supporting the new technology approach a novel technique for Si-based free-solution electrophoresis microsystem fabrication.

Original languageEnglish (US)
Title of host publication2005 IEEE International Conference on Robotics and Biomimetics, ROBIO
Pages101-104
Number of pages4
StatePublished - Dec 1 2005
Event2005 IEEE International Conference on Robotics and Biomimetics, ROBIO - Shatin, N.T., China
Duration: Jul 5 2005Jul 9 2005

Publication series

Name2005 IEEE International Conference on Robotics and Biomimetics, ROBIO
Volume2005

Other

Other2005 IEEE International Conference on Robotics and Biomimetics, ROBIO
CountryChina
CityShatin, N.T.
Period7/5/057/9/05

ASJC Scopus subject areas

  • Engineering(all)

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