Hybrid electro-optic polymer/sol-gel waveguide modulator fabricated by all-wet etching process

Y. Enami, G. Meredith, N. Peyghambarian, A. K.Y. Jen

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The fabrication of a hybrid electro-optic polymer (EOP)/sol-gel waveguide modulator by all-wet etching process was discussed. Sol-gel overcladding was used. Optical confinement in the EOP that enables adiabatic transition between the waveguides was also discussed. It was found that hybrid approach has advantages for coupling loss, waveguide and signal stability. The results also show that if thickness of the EOP was increased to 0.9 μm in a laterally confined structure it reduces the V π to 22 V.

Original languageEnglish (US)
Pages (from-to)4692-4694
Number of pages3
JournalApplied Physics Letters
Issue number23
StatePublished - Dec 8 2003


ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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