Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides

Y. Enami, A. K Y Jen, G. Meredith, Nasser N Peyghambarian

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

We report hybrid electro-optic (EO) polymer/sol-gel waveguide modulators with a structure for an EO polymer confined laterally in a sol-gel over cladding, which is fabricated by all-wet etching process. The structure enables an adiabatic transition between the sol-gel waveguide and thick EO polymer overlayer. Intensity mode is confined well in 0.9-μm-thick EO polymer overlayer, which reduces a half wave voltage (V π) due to increased overlap integral in the hybrid EO modulator. Straight channel birefringence EO modulators with the structure reduce the V π by the factor of 4 after guided wave well confined in the EO polymer. The straight channel waveguide modulator with 2.4-cm-long electrode demonstrated the V π of 13 V. Preliminary testing results using a Mach-Zehnder waveguide modulator were investigated to reduce the V π further.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsJ.G. Grote, T. Kaino
Pages28-35
Number of pages8
Volume5351
DOIs
Publication statusPublished - 2004
EventOrganic Photonic Materials and Devices VI - San Jose, CA, United States
Duration: Jan 27 2004Jan 29 2004

Other

OtherOrganic Photonic Materials and Devices VI
CountryUnited States
CitySan Jose, CA
Period1/27/041/29/04

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Enami, Y., Jen, A. K. Y., Meredith, G., & Peyghambarian, N. N. (2004). Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides. In J. G. Grote, & T. Kaino (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 5351, pp. 28-35) https://doi.org/10.1117/12.527613