Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides

Y. Enami, A. K.Y. Jen, G. Meredith, N. Peyghambarian

Research output: Contribution to journalConference article

4 Scopus citations

Abstract

We report hybrid electro-optic (EO) polymer/sol-gel waveguide modulators with a structure for an EO polymer confined laterally in a sol-gel over cladding, which is fabricated by all-wet etching process. The structure enables an adiabatic transition between the sol-gel waveguide and thick EO polymer overlayer. Intensity mode is confined well in 0.9-μm-thick EO polymer overlayer, which reduces a half wave voltage (V π) due to increased overlap integral in the hybrid EO modulator. Straight channel birefringence EO modulators with the structure reduce the V π by the factor of 4 after guided wave well confined in the EO polymer. The straight channel waveguide modulator with 2.4-cm-long electrode demonstrated the V π of 13 V. Preliminary testing results using a Mach-Zehnder waveguide modulator were investigated to reduce the V π further.

Original languageEnglish (US)
Pages (from-to)28-35
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5351
DOIs
StatePublished - Aug 16 2004
EventOrganic Photonic Materials and Devices VI - San Jose, CA, United States
Duration: Jan 27 2004Jan 29 2004

Keywords

  • Electro-optic polymer
  • Fiber-coupling loss
  • Hybrid modulators
  • Sol-gel waveguide
  • Wet etching

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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