Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides

Y. Enami, A. K Y Jen, G. Meredith, Nasser N Peyghambarian

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

We report hybrid electro-optic (EO) polymer/sol-gel waveguide modulators with a structure for an EO polymer confined laterally in a sol-gel over cladding, which is fabricated by all-wet etching process. The structure enables an adiabatic transition between the sol-gel waveguide and thick EO polymer overlayer. Intensity mode is confined well in 0.9-μm-thick EO polymer overlayer, which reduces a half wave voltage (V π) due to increased overlap integral in the hybrid EO modulator. Straight channel birefringence EO modulators with the structure reduce the V π by the factor of 4 after guided wave well confined in the EO polymer. The straight channel waveguide modulator with 2.4-cm-long electrode demonstrated the V π of 13 V. Preliminary testing results using a Mach-Zehnder waveguide modulator were investigated to reduce the V π further.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsJ.G. Grote, T. Kaino
Pages28-35
Number of pages8
Volume5351
DOIs
StatePublished - 2004
EventOrganic Photonic Materials and Devices VI - San Jose, CA, United States
Duration: Jan 27 2004Jan 29 2004

Other

OtherOrganic Photonic Materials and Devices VI
CountryUnited States
CitySan Jose, CA
Period1/27/041/29/04

Fingerprint

Wet etching
Electrooptical effects
Modulators
Mach number
electro-optics
Sol-gels
modulators
Waveguides
etching
gels
waveguides
polymers
Polymers
Guided electromagnetic wave propagation
Birefringence
birefringence
Electrodes
electrodes
Testing
Electric potential

Keywords

  • Electro-optic polymer
  • Fiber-coupling loss
  • Hybrid modulators
  • Sol-gel waveguide
  • Wet etching

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Enami, Y., Jen, A. K. Y., Meredith, G., & Peyghambarian, N. N. (2004). Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides. In J. G. Grote, & T. Kaino (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 5351, pp. 28-35) https://doi.org/10.1117/12.527613

Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides. / Enami, Y.; Jen, A. K Y; Meredith, G.; Peyghambarian, Nasser N.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / J.G. Grote; T. Kaino. Vol. 5351 2004. p. 28-35.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Enami, Y, Jen, AKY, Meredith, G & Peyghambarian, NN 2004, Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides. in JG Grote & T Kaino (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 5351, pp. 28-35, Organic Photonic Materials and Devices VI, San Jose, CA, United States, 1/27/04. https://doi.org/10.1117/12.527613
Enami Y, Jen AKY, Meredith G, Peyghambarian NN. Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides. In Grote JG, Kaino T, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 5351. 2004. p. 28-35 https://doi.org/10.1117/12.527613
Enami, Y. ; Jen, A. K Y ; Meredith, G. ; Peyghambarian, Nasser N. / Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides. Proceedings of SPIE - The International Society for Optical Engineering. editor / J.G. Grote ; T. Kaino. Vol. 5351 2004. pp. 28-35
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abstract = "We report hybrid electro-optic (EO) polymer/sol-gel waveguide modulators with a structure for an EO polymer confined laterally in a sol-gel over cladding, which is fabricated by all-wet etching process. The structure enables an adiabatic transition between the sol-gel waveguide and thick EO polymer overlayer. Intensity mode is confined well in 0.9-μm-thick EO polymer overlayer, which reduces a half wave voltage (V π) due to increased overlap integral in the hybrid EO modulator. Straight channel birefringence EO modulators with the structure reduce the V π by the factor of 4 after guided wave well confined in the EO polymer. The straight channel waveguide modulator with 2.4-cm-long electrode demonstrated the V π of 13 V. Preliminary testing results using a Mach-Zehnder waveguide modulator were investigated to reduce the V π further.",
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AB - We report hybrid electro-optic (EO) polymer/sol-gel waveguide modulators with a structure for an EO polymer confined laterally in a sol-gel over cladding, which is fabricated by all-wet etching process. The structure enables an adiabatic transition between the sol-gel waveguide and thick EO polymer overlayer. Intensity mode is confined well in 0.9-μm-thick EO polymer overlayer, which reduces a half wave voltage (V π) due to increased overlap integral in the hybrid EO modulator. Straight channel birefringence EO modulators with the structure reduce the V π by the factor of 4 after guided wave well confined in the EO polymer. The straight channel waveguide modulator with 2.4-cm-long electrode demonstrated the V π of 13 V. Preliminary testing results using a Mach-Zehnder waveguide modulator were investigated to reduce the V π further.

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