Hyper-NA imaging with solid-immersion optics and induced polarization imaging

Jun Zhang, Seung Hune Yang, Tom D. Milster, Warren Bletscher, Delbert Hansen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Solid immersion lens (SIL) is used in microscopic systems for hyper numerical aperture (NA) imaging. The NA of the SIL microscope can be larger than 2 by using the high refractive index SIL. In this paper, examples of hyper-NA (NA>1.4) imaging are illustrated, including a normal SIL microscope for imaging samples like CPU chips, photomasks which have no cover layer and a special SIL microscope for imaging samples like Blu-Ray optical discs which have cover layer to protect the pattern. In both cases, good contrast images can be achieved by minimizing the system aberration. At the end, characteristics of induced polarization imaging (imaging through crossed polarizers) and a twostep solid immersion lens using Gallium Phosphide (GaP) (NA∼2) are discussed.

Original languageEnglish (US)
Title of host publicationThree-Dimensional and Multidimensional Microscopy
Subtitle of host publicationImage Acquisition and Processing XVII
DOIs
StatePublished - May 10 2010
EventThree-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XVII - San Francisco, CA, United States
Duration: Jan 25 2010Jan 28 2010

Publication series

NameProgress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume7570
ISSN (Print)1605-7422

Other

OtherThree-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XVII
CountryUnited States
CitySan Francisco, CA
Period1/25/101/28/10

Keywords

  • Hyper-NA
  • Induced polarization
  • Microscopy
  • Solid immersion

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Biomaterials
  • Atomic and Molecular Physics, and Optics
  • Radiology Nuclear Medicine and imaging

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  • Cite this

    Zhang, J., Yang, S. H., Milster, T. D., Bletscher, W., & Hansen, D. (2010). Hyper-NA imaging with solid-immersion optics and induced polarization imaging. In Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XVII [757012] (Progress in Biomedical Optics and Imaging - Proceedings of SPIE; Vol. 7570). https://doi.org/10.1117/12.848971