Hyper-NA imaging with solid-immersion optics and induced polarization imaging

Jun Zhang; Seung Hune Yang; Tom D. Milster; Warren Bletscher; Delbert Hansen

doi:10.1117/12.848971

Hyper-NA imaging with solid-immersion optics and induced polarization imaging

Jun Zhang, Seung Hune Yang, Tom D. Milster, Warren Bletscher, Delbert Hansen

Optical Sciences, College of

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Solid immersion lens (SIL) is used in microscopic systems for hyper numerical aperture (NA) imaging. The NA of the SIL microscope can be larger than 2 by using the high refractive index SIL. In this paper, examples of hyper-NA (NA>1.4) imaging are illustrated, including a normal SIL microscope for imaging samples like CPU chips, photomasks which have no cover layer and a special SIL microscope for imaging samples like Blu-Ray optical discs which have cover layer to protect the pattern. In both cases, good contrast images can be achieved by minimizing the system aberration. At the end, characteristics of induced polarization imaging (imaging through crossed polarizers) and a twostep solid immersion lens using Gallium Phosphide (GaP) (NA∼2) are discussed.

Original language	English (US)
Title of host publication	Three-Dimensional and Multidimensional Microscopy
Subtitle of host publication	Image Acquisition and Processing XVII
DOIs	https://doi.org/10.1117/12.848971
State	Published - 2010
Event	Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XVII - San Francisco, CA, United States Duration: Jan 25 2010 → Jan 28 2010

Publication series

Name	Progress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume	7570
ISSN (Print)	1605-7422

Other

Other	Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XVII
Country	United States
City	San Francisco, CA
Period	1/25/10 → 1/28/10

Keywords

Hyper-NA
Induced polarization
Microscopy
Solid immersion

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Biomaterials
Atomic and Molecular Physics, and Optics
Radiology Nuclear Medicine and imaging

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Hyper-NA imaging with solid-immersion optics and induced polarization imaging. / Zhang, Jun; Yang, Seung Hune; Milster, Tom D.; Bletscher, Warren; Hansen, Delbert.

Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XVII. 2010. 757012 (Progress in Biomedical Optics and Imaging - Proceedings of SPIE; Vol. 7570).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Zhang, J, Yang, SH, Milster, TD, Bletscher, W & Hansen, D 2010, Hyper-NA imaging with solid-immersion optics and induced polarization imaging. in Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XVII., 757012, Progress in Biomedical Optics and Imaging - Proceedings of SPIE, vol. 7570, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XVII, San Francisco, CA, United States, 1/25/10. https://doi.org/10.1117/12.848971

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AB - Solid immersion lens (SIL) is used in microscopic systems for hyper numerical aperture (NA) imaging. The NA of the SIL microscope can be larger than 2 by using the high refractive index SIL. In this paper, examples of hyper-NA (NA>1.4) imaging are illustrated, including a normal SIL microscope for imaging samples like CPU chips, photomasks which have no cover layer and a special SIL microscope for imaging samples like Blu-Ray optical discs which have cover layer to protect the pattern. In both cases, good contrast images can be achieved by minimizing the system aberration. At the end, characteristics of induced polarization imaging (imaging through crossed polarizers) and a twostep solid immersion lens using Gallium Phosphide (GaP) (NA∼2) are discussed.

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Hyper-NA imaging with solid-immersion optics and induced polarization imaging

Abstract

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Keywords

ASJC Scopus subject areas

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