Hyper-NA imaging with solid-immersion optics and induced polarization imaging

Jun Zhang, Seung Hune Yang, Thomas D Milster, Warren Bletscher, Delbert Hansen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Solid immersion lens (SIL) is used in microscopic systems for hyper numerical aperture (NA) imaging. The NA of the SIL microscope can be larger than 2 by using the high refractive index SIL. In this paper, examples of hyper-NA (NA>1.4) imaging are illustrated, including a normal SIL microscope for imaging samples like CPU chips, photomasks which have no cover layer and a special SIL microscope for imaging samples like Blu-Ray optical discs which have cover layer to protect the pattern. In both cases, good contrast images can be achieved by minimizing the system aberration. At the end, characteristics of induced polarization imaging (imaging through crossed polarizers) and a twostep solid immersion lens using Gallium Phosphide (GaP) (NA∼2) are discussed.

Original languageEnglish (US)
Title of host publicationProgress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume7570
DOIs
StatePublished - 2010
EventThree-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XVII - San Francisco, CA, United States
Duration: Jan 25 2010Jan 28 2010

Other

OtherThree-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XVII
CountryUnited States
CitySan Francisco, CA
Period1/25/101/28/10

Fingerprint

Immersion
numerical aperture
submerging
Lenses
Optics
lenses
optics
Polarization
Imaging techniques
polarization
Microscopes
microscopes
Gallium phosphide
gallium phosphides
Photomasks
Refractometry
photomasks
optical disks
image contrast
polarizers

Keywords

  • Hyper-NA
  • Induced polarization
  • Microscopy
  • Solid immersion

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials
  • Biomaterials
  • Radiology Nuclear Medicine and imaging

Cite this

Zhang, J., Yang, S. H., Milster, T. D., Bletscher, W., & Hansen, D. (2010). Hyper-NA imaging with solid-immersion optics and induced polarization imaging. In Progress in Biomedical Optics and Imaging - Proceedings of SPIE (Vol. 7570). [757012] https://doi.org/10.1117/12.848971

Hyper-NA imaging with solid-immersion optics and induced polarization imaging. / Zhang, Jun; Yang, Seung Hune; Milster, Thomas D; Bletscher, Warren; Hansen, Delbert.

Progress in Biomedical Optics and Imaging - Proceedings of SPIE. Vol. 7570 2010. 757012.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Zhang, J, Yang, SH, Milster, TD, Bletscher, W & Hansen, D 2010, Hyper-NA imaging with solid-immersion optics and induced polarization imaging. in Progress in Biomedical Optics and Imaging - Proceedings of SPIE. vol. 7570, 757012, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XVII, San Francisco, CA, United States, 1/25/10. https://doi.org/10.1117/12.848971
Zhang J, Yang SH, Milster TD, Bletscher W, Hansen D. Hyper-NA imaging with solid-immersion optics and induced polarization imaging. In Progress in Biomedical Optics and Imaging - Proceedings of SPIE. Vol. 7570. 2010. 757012 https://doi.org/10.1117/12.848971
Zhang, Jun ; Yang, Seung Hune ; Milster, Thomas D ; Bletscher, Warren ; Hansen, Delbert. / Hyper-NA imaging with solid-immersion optics and induced polarization imaging. Progress in Biomedical Optics and Imaging - Proceedings of SPIE. Vol. 7570 2010.
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