Abstract
Solid immersion lens (SIL) is used in microscopic systems for hyper numerical aperture (NA) imaging. The NA of the SIL microscope can be larger than 2 by using the high refractive index SIL. In this paper, examples of hyper-NA (NA>1.4) imaging are illustrated, including a normal SIL microscope for imaging samples like CPU chips, photomasks which have no cover layer and a special SIL microscope for imaging samples like Blu-Ray optical discs which have cover layer to protect the pattern. In both cases, good contrast images can be achieved by minimizing the system aberration. At the end, characteristics of induced polarization imaging (imaging through crossed polarizers) and a twostep solid immersion lens using Gallium Phosphide (GaP) (NA∼2) are discussed.
| Original language | English (US) |
|---|---|
| Title of host publication | Progress in Biomedical Optics and Imaging - Proceedings of SPIE |
| Volume | 7570 |
| DOIs | |
| State | Published - 2010 |
| Event | Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XVII - San Francisco, CA, United States Duration: Jan 25 2010 → Jan 28 2010 |
Other
| Other | Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XVII |
|---|---|
| Country | United States |
| City | San Francisco, CA |
| Period | 1/25/10 → 1/28/10 |
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Keywords
- Hyper-NA
- Induced polarization
- Microscopy
- Solid immersion
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- Electronic, Optical and Magnetic Materials
- Biomaterials
- Radiology Nuclear Medicine and imaging
Cite this
Hyper-NA imaging with solid-immersion optics and induced polarization imaging. / Zhang, Jun; Yang, Seung Hune; Milster, Thomas D; Bletscher, Warren; Hansen, Delbert.
Progress in Biomedical Optics and Imaging - Proceedings of SPIE. Vol. 7570 2010. 757012.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Hyper-NA imaging with solid-immersion optics and induced polarization imaging
AU - Zhang, Jun
AU - Yang, Seung Hune
AU - Milster, Thomas D
AU - Bletscher, Warren
AU - Hansen, Delbert
PY - 2010
Y1 - 2010
N2 - Solid immersion lens (SIL) is used in microscopic systems for hyper numerical aperture (NA) imaging. The NA of the SIL microscope can be larger than 2 by using the high refractive index SIL. In this paper, examples of hyper-NA (NA>1.4) imaging are illustrated, including a normal SIL microscope for imaging samples like CPU chips, photomasks which have no cover layer and a special SIL microscope for imaging samples like Blu-Ray optical discs which have cover layer to protect the pattern. In both cases, good contrast images can be achieved by minimizing the system aberration. At the end, characteristics of induced polarization imaging (imaging through crossed polarizers) and a twostep solid immersion lens using Gallium Phosphide (GaP) (NA∼2) are discussed.
AB - Solid immersion lens (SIL) is used in microscopic systems for hyper numerical aperture (NA) imaging. The NA of the SIL microscope can be larger than 2 by using the high refractive index SIL. In this paper, examples of hyper-NA (NA>1.4) imaging are illustrated, including a normal SIL microscope for imaging samples like CPU chips, photomasks which have no cover layer and a special SIL microscope for imaging samples like Blu-Ray optical discs which have cover layer to protect the pattern. In both cases, good contrast images can be achieved by minimizing the system aberration. At the end, characteristics of induced polarization imaging (imaging through crossed polarizers) and a twostep solid immersion lens using Gallium Phosphide (GaP) (NA∼2) are discussed.
KW - Hyper-NA
KW - Induced polarization
KW - Microscopy
KW - Solid immersion
UR - http://www.scopus.com/inward/record.url?scp=77951844022&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=77951844022&partnerID=8YFLogxK
U2 - 10.1117/12.848971
DO - 10.1117/12.848971
M3 - Conference contribution
SN - 9780819479662
VL - 7570
BT - Progress in Biomedical Optics and Imaging - Proceedings of SPIE
ER -