Imaging issues for interferometric measurement of aspheric surfaces using CGH null correctors

Ping Zhou, Jim Burge, Chunyu Zhao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Scopus citations

Abstract

Aspheric surfaces are measured using standard interferometers coupled with computer generated holograms (CGHs) that compensate the aspheric wavefronts. Such systems can measure complex aspheric shapes with accuracy of a few nanometers. However, the imaging properties of the interferometer-CGH combination can provide limitations for data mapping, resolution, and accuracy. These effects are explored, with an emphasis on the diffraction effects that are unique to interferometry.

Original languageEnglish (US)
Title of host publicationInterferometry XV
Subtitle of host publicationTechniques and Analysis
DOIs
StatePublished - Dec 15 2010
EventInterferometry XV: Techniques and Analysis - San Diego, CA, United States
Duration: Aug 2 2010Aug 4 2010

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7790
ISSN (Print)0277-786X

Other

OtherInterferometry XV: Techniques and Analysis
CountryUnited States
CitySan Diego, CA
Period8/2/108/4/10

Keywords

  • CGH
  • Edge diffraction
  • Imaging aberration
  • Phase smoothing
  • Talbot effect
  • Transfer function

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Zhou, P., Burge, J., & Zhao, C. (2010). Imaging issues for interferometric measurement of aspheric surfaces using CGH null correctors. In Interferometry XV: Techniques and Analysis [77900L] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7790). https://doi.org/10.1117/12.862427