We describe a novel imaging technique that employs coherent acoustic phonon pulses which are generated and detected by ultrafast optical methods. Sub-micron resolution images of A1 patterns lithographically etched on a Si substrate are shown.
|Original language||English (US)|
|Number of pages||5|
|Journal||Springer Series in Chemical Physics|
|State||Published - Dec 1 2004|
ASJC Scopus subject areas
- Physical and Theoretical Chemistry