Imaging polarimeters for optical metrology

Joseph L. Pezzaniti, Russell A. Chipman

Research output: Chapter in Book/Report/Conference proceedingConference contribution

28 Scopus citations

Abstract

In this paper we describe two configurations of imaging polarimeters designed for polarimetric optical metrology. The first is a Stokes imaging polarimeter which measures the polarization response of optical systems to spherical or planar waves of known polarization. The output is images of the degree of polarization, orientation and eccentricity of polarization ellipses, or Stokes parameters displayed as a function of either the exit pupil or image coordinate of the optical system. The second configuration is a Mueller imaging polarimeter which measures the Mueller matrix of an optical system on a ray by ray basis. Calibration issues involved in building these instruments are addressed along with a brief discussion on polarization aberration mechanisms.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsRussel A. Chipman, John W. Morris
PublisherPubl by Int Soc for Optical Engineering
Pages280-294
Number of pages15
ISBN (Print)0819403725
StatePublished - Dec 1 1990
Externally publishedYes
EventPolarimetry: Radar, Infrared, Visible, Ultraviolet, and X-Ray - Huntsville, AL, USA
Duration: May 15 1990May 17 1990

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume1317
ISSN (Print)0277-786X

Other

OtherPolarimetry: Radar, Infrared, Visible, Ultraviolet, and X-Ray
CityHuntsville, AL, USA
Period5/15/905/17/90

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Pezzaniti, J. L., & Chipman, R. A. (1990). Imaging polarimeters for optical metrology. In R. A. Chipman, & J. W. Morris (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (pp. 280-294). (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 1317). Publ by Int Soc for Optical Engineering.