IMEC clean: A new concept for particle and metal removal on Si surfaces

M. Meuris, P. W. Mertens, A. Opdebeeck, H. F. Schmidt, M. Depas, G. Vereecke, M. M. Heyns, A. Philipossian

Research output: Contribution to specialist publicationArticle

57 Scopus citations

Fingerprint

Dive into the research topics of 'IMEC clean: A new concept for particle and metal removal on Si surfaces'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds