Implantable capacitive micromachined ultrasonic imager probe for photoacoustic imaging

Xiaoyang Cheng, Jinguang Chen, Sheng Wen Huang, Russell S Witte, Pinyen Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

This paper reports the development of a miniature slab-shaped capacitive micromachined ultrasonic transducer (CMUT) array for photoacoustic imaging (PAI). As a minimally invasive imager, this device is capable of receiving relatively weak ultrasound signals that are difficult to access with non-invasive transducers and is useful for acquiring photoacoustic images of biological structures. This CMUT imager probe was fabricated using a two-layer polysilicon surface micromachining process, followed by a double-sided deep silicon etching process for shaping the silicon substrate into a thin probes. New CMUT structures were developed for this implantable imager probe, aiming at reducing the effective gap height and the driving voltage, as well as alleviating the charging trap effect. Photoacoustic imaging of the nerve cord of a lobster using this miniature CMUT array has been demonstrated.

Original languageEnglish (US)
Title of host publication2008 Solid-State Sensors, Actuators, and Microsystems Workshop
EditorsLeland Spangler, Kimberly L. Turner
PublisherTransducer Research Foundation
Pages312-315
Number of pages4
ISBN (Electronic)9780964002494
Publication statusPublished - Jan 1 2008
Event2008 Solid-State Sensors, Actuators, and Microsystems Workshop - Hilton Head Island, United States
Duration: Jun 1 2008Jun 5 2008

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference2008 Solid-State Sensors, Actuators, and Microsystems Workshop
CountryUnited States
CityHilton Head Island
Period6/1/086/5/08

    Fingerprint

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Hardware and Architecture

Cite this

Cheng, X., Chen, J., Huang, S. W., Witte, R. S., & Lin, P. (2008). Implantable capacitive micromachined ultrasonic imager probe for photoacoustic imaging. In L. Spangler, & K. L. Turner (Eds.), 2008 Solid-State Sensors, Actuators, and Microsystems Workshop (pp. 312-315). (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). Transducer Research Foundation.