IMPROVEMENT OF ELECTROSTATIC LENSES FOR ION BEAM LITHOGRAPHY.

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Abstract

A systematic investigation of a large number of practically feasible axial potential distributions was carried out with a subsequent reconstruction of the electrode systems producing such distributions. By using parametrized analytical functions and different curve-fitting techniques it was possible to find many potential distributions with both small spherical and chromatic aberrations. A cubic spline curve-fitting algorithm proved to be especially effective. The reconstruction of the electrode systems resulted in several new electrostatic ion lenses with excellent optical properties. As an example, a four-electrode electrostatic lens is presented with a voltage ratio of V//m//a//x/V//m//i//n equals 9, spherical aberration coefficient C//s//0/f//0 equals 0. 92 and chromatic aberration coefficient C//c//0/f//0 equals 0. 55 (both coefficients are referred to the object, related to the object side focal length and calculated for the case of infinite magnification). With an acceptance angle alpha //0 equals 5 mrad and magnification M equals 2. 58 a 10. 5 nm aberration disk diameter can be achieved. If alpha //0 equals 2 mrad, the disk diameter is 3 nm.

Original languageEnglish (US)
Pages (from-to)1137-1140
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume1
Issue number4
DOIs
StatePublished - Oct 1983
Externally publishedYes

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Ion beam lithography
Electrostatic lenses
Aberrations
Curve fitting
Electrodes
Splines
Electrostatics
Lenses
Optical properties
Ions
Electric potential

ASJC Scopus subject areas

  • Engineering(all)

Cite this

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title = "IMPROVEMENT OF ELECTROSTATIC LENSES FOR ION BEAM LITHOGRAPHY.",
abstract = "A systematic investigation of a large number of practically feasible axial potential distributions was carried out with a subsequent reconstruction of the electrode systems producing such distributions. By using parametrized analytical functions and different curve-fitting techniques it was possible to find many potential distributions with both small spherical and chromatic aberrations. A cubic spline curve-fitting algorithm proved to be especially effective. The reconstruction of the electrode systems resulted in several new electrostatic ion lenses with excellent optical properties. As an example, a four-electrode electrostatic lens is presented with a voltage ratio of V//m//a//x/V//m//i//n equals 9, spherical aberration coefficient C//s//0/f//0 equals 0. 92 and chromatic aberration coefficient C//c//0/f//0 equals 0. 55 (both coefficients are referred to the object, related to the object side focal length and calculated for the case of infinite magnification). With an acceptance angle alpha //0 equals 5 mrad and magnification M equals 2. 58 a 10. 5 nm aberration disk diameter can be achieved. If alpha //0 equals 2 mrad, the disk diameter is 3 nm.",
author = "Szilagyi, {Miklos N}",
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AU - Szilagyi, Miklos N

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N2 - A systematic investigation of a large number of practically feasible axial potential distributions was carried out with a subsequent reconstruction of the electrode systems producing such distributions. By using parametrized analytical functions and different curve-fitting techniques it was possible to find many potential distributions with both small spherical and chromatic aberrations. A cubic spline curve-fitting algorithm proved to be especially effective. The reconstruction of the electrode systems resulted in several new electrostatic ion lenses with excellent optical properties. As an example, a four-electrode electrostatic lens is presented with a voltage ratio of V//m//a//x/V//m//i//n equals 9, spherical aberration coefficient C//s//0/f//0 equals 0. 92 and chromatic aberration coefficient C//c//0/f//0 equals 0. 55 (both coefficients are referred to the object, related to the object side focal length and calculated for the case of infinite magnification). With an acceptance angle alpha //0 equals 5 mrad and magnification M equals 2. 58 a 10. 5 nm aberration disk diameter can be achieved. If alpha //0 equals 2 mrad, the disk diameter is 3 nm.

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