### Abstract

A systematic investigation of a large number of practically feasible axial potential distributions was carried out with a subsequent reconstruction of the electrode systems producing such distributions. By using parametrized analytical functions and different curve-fitting techniques it was possible to find many potential distributions with both small spherical and chromatic aberrations. A cubic spline curve-fitting algorithm proved to be especially effective. The reconstruction of the electrode systems resulted in several new electrostatic ion lenses with excellent optical properties. As an example, a four-electrode electrostatic lens is presented with a voltage ratio of V//m//a//x/V//m//i//n equals 9, spherical aberration coefficient C//s//0/f//0 equals 0. 92 and chromatic aberration coefficient C//c//0/f//0 equals 0. 55 (both coefficients are referred to the object, related to the object side focal length and calculated for the case of infinite magnification). With an acceptance angle alpha //0 equals 5 mrad and magnification M equals 2. 58 a 10. 5 nm aberration disk diameter can be achieved. If alpha //0 equals 2 mrad, the disk diameter is 3 nm.

Original language | English (US) |
---|---|

Pages (from-to) | 1137-1140 |

Number of pages | 4 |

Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |

Volume | 1 |

Issue number | 4 |

DOIs | |

State | Published - Oct 1983 |

Externally published | Yes |

### Fingerprint

### ASJC Scopus subject areas

- Engineering(all)

### Cite this

**IMPROVEMENT OF ELECTROSTATIC LENSES FOR ION BEAM LITHOGRAPHY.** / Szilagyi, Miklos N.

Research output: Contribution to journal › Article

}

TY - JOUR

T1 - IMPROVEMENT OF ELECTROSTATIC LENSES FOR ION BEAM LITHOGRAPHY.

AU - Szilagyi, Miklos N

PY - 1983/10

Y1 - 1983/10

N2 - A systematic investigation of a large number of practically feasible axial potential distributions was carried out with a subsequent reconstruction of the electrode systems producing such distributions. By using parametrized analytical functions and different curve-fitting techniques it was possible to find many potential distributions with both small spherical and chromatic aberrations. A cubic spline curve-fitting algorithm proved to be especially effective. The reconstruction of the electrode systems resulted in several new electrostatic ion lenses with excellent optical properties. As an example, a four-electrode electrostatic lens is presented with a voltage ratio of V//m//a//x/V//m//i//n equals 9, spherical aberration coefficient C//s//0/f//0 equals 0. 92 and chromatic aberration coefficient C//c//0/f//0 equals 0. 55 (both coefficients are referred to the object, related to the object side focal length and calculated for the case of infinite magnification). With an acceptance angle alpha //0 equals 5 mrad and magnification M equals 2. 58 a 10. 5 nm aberration disk diameter can be achieved. If alpha //0 equals 2 mrad, the disk diameter is 3 nm.

AB - A systematic investigation of a large number of practically feasible axial potential distributions was carried out with a subsequent reconstruction of the electrode systems producing such distributions. By using parametrized analytical functions and different curve-fitting techniques it was possible to find many potential distributions with both small spherical and chromatic aberrations. A cubic spline curve-fitting algorithm proved to be especially effective. The reconstruction of the electrode systems resulted in several new electrostatic ion lenses with excellent optical properties. As an example, a four-electrode electrostatic lens is presented with a voltage ratio of V//m//a//x/V//m//i//n equals 9, spherical aberration coefficient C//s//0/f//0 equals 0. 92 and chromatic aberration coefficient C//c//0/f//0 equals 0. 55 (both coefficients are referred to the object, related to the object side focal length and calculated for the case of infinite magnification). With an acceptance angle alpha //0 equals 5 mrad and magnification M equals 2. 58 a 10. 5 nm aberration disk diameter can be achieved. If alpha //0 equals 2 mrad, the disk diameter is 3 nm.

UR - http://www.scopus.com/inward/record.url?scp=0020833237&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0020833237&partnerID=8YFLogxK

U2 - 10.1116/1.582651

DO - 10.1116/1.582651

M3 - Article

AN - SCOPUS:0020833237

VL - 1

SP - 1137

EP - 1140

JO - Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

JF - Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

SN - 1071-1023

IS - 4

ER -