In-situ characterization of dynamics of impurity absorption and outgassing in porous low-k dielectric thin films

Asad Iqbal, Junpin Yao, Harpreet Juneja, Farhang Shadman, Roger P. Sperline

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationAIChE Annual Meeting, Conference Proceedings
StatePublished - 2007
Event2007 AIChE Annual Meeting - Salt Lake City, UT, United States
Duration: Nov 4 2007Nov 9 2007

Other

Other2007 AIChE Annual Meeting
CountryUnited States
CitySalt Lake City, UT
Period11/4/0711/9/07

Fingerprint

Dielectric films
Degassing
Impurities
Thin films
Low-k dielectric

ASJC Scopus subject areas

  • Chemical Engineering(all)
  • Chemistry(all)

Cite this

Iqbal, A., Yao, J., Juneja, H., Shadman, F., & Sperline, R. P. (2007). In-situ characterization of dynamics of impurity absorption and outgassing in porous low-k dielectric thin films. In AIChE Annual Meeting, Conference Proceedings

In-situ characterization of dynamics of impurity absorption and outgassing in porous low-k dielectric thin films. / Iqbal, Asad; Yao, Junpin; Juneja, Harpreet; Shadman, Farhang; Sperline, Roger P.

AIChE Annual Meeting, Conference Proceedings. 2007.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Iqbal, A, Yao, J, Juneja, H, Shadman, F & Sperline, RP 2007, In-situ characterization of dynamics of impurity absorption and outgassing in porous low-k dielectric thin films. in AIChE Annual Meeting, Conference Proceedings. 2007 AIChE Annual Meeting, Salt Lake City, UT, United States, 11/4/07.
Iqbal A, Yao J, Juneja H, Shadman F, Sperline RP. In-situ characterization of dynamics of impurity absorption and outgassing in porous low-k dielectric thin films. In AIChE Annual Meeting, Conference Proceedings. 2007
Iqbal, Asad ; Yao, Junpin ; Juneja, Harpreet ; Shadman, Farhang ; Sperline, Roger P. / In-situ characterization of dynamics of impurity absorption and outgassing in porous low-k dielectric thin films. AIChE Annual Meeting, Conference Proceedings. 2007.
@inproceedings{15014639f8dc4bd7bb027a3127139834,
title = "In-situ characterization of dynamics of impurity absorption and outgassing in porous low-k dielectric thin films",
author = "Asad Iqbal and Junpin Yao and Harpreet Juneja and Farhang Shadman and Sperline, {Roger P.}",
year = "2007",
language = "English (US)",
isbn = "9780816910229",
booktitle = "AIChE Annual Meeting, Conference Proceedings",

}

TY - GEN

T1 - In-situ characterization of dynamics of impurity absorption and outgassing in porous low-k dielectric thin films

AU - Iqbal, Asad

AU - Yao, Junpin

AU - Juneja, Harpreet

AU - Shadman, Farhang

AU - Sperline, Roger P.

PY - 2007

Y1 - 2007

UR - http://www.scopus.com/inward/record.url?scp=80053655692&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=80053655692&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:80053655692

SN - 9780816910229

BT - AIChE Annual Meeting, Conference Proceedings

ER -