In-situ characterization of dynamics of impurity absorption and outgassing in porous low-k dielectric thin films

Asad Iqbal, Junpin Yao, Harpreet Juneja, Farhang Shadman, Roger P. Sperline

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publication2007 AIChE Annual Meeting
StatePublished - Dec 1 2007
Event2007 AIChE Annual Meeting - Salt Lake City, UT, United States
Duration: Nov 4 2007Nov 9 2007

Publication series

NameAIChE Annual Meeting, Conference Proceedings

Other

Other2007 AIChE Annual Meeting
CountryUnited States
CitySalt Lake City, UT
Period11/4/0711/9/07

ASJC Scopus subject areas

  • Chemical Engineering(all)
  • Chemistry(all)

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