In situ FTIR experimental results in the silylation of low-k films with hexamethyldisilazane dissolved in supercritical carbon dioxide

Eduardo Vyhmeister, Lorenzo Reyes-Bozo, Héctor Valdés-González, José Luis Salazar, Anthony J Muscat, L. Antonio Estévez, David Suleiman

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

In situ Fourier Transform Infrared Spectroscopy measurements were performed using an innovative equipment to study the surface modification reaction between a functionalized porous MSQ-film and hexamethyldisilazane (HMDS) dissolved in CO2 at supercritical conditions (scCO2). scCO2 was used in the heterogeneous reaction due to enhancing properties, ideal for porous materials. Different infrared signatures, from the gas and solid phases, were observed and identified, implying gas-gas and solid-gas phase reactions. Among the different component signatures observed in the gas phase, carbonic acid was observed as a possible silylating gas phase nucleophilic component, while in the solid phase the predominant reaction mechanism proceeded by forming SiOSi bonds and Trimethylaminosilane (as gas phase product).

Original languageEnglish (US)
Pages (from-to)134-143
Number of pages10
JournalJournal of Supercritical Fluids
Volume90
DOIs
StatePublished - 2014

Fingerprint

Carbon Dioxide
carbon dioxide
Carbon dioxide
Gases
vapor phases
solid phases
carbonic acid
infrared signatures
Carbonic Acid
porous materials
gases
infrared spectroscopy
signatures
hexamethylsilazane
Fourier transform infrared spectroscopy
Porous materials
Surface treatment
products
Infrared radiation
Acids

Keywords

  • Heterogeneous reaction
  • HMDS
  • In situ FTIR
  • Low-k
  • Silylation

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Physical and Theoretical Chemistry
  • Chemical Engineering(all)

Cite this

In situ FTIR experimental results in the silylation of low-k films with hexamethyldisilazane dissolved in supercritical carbon dioxide. / Vyhmeister, Eduardo; Reyes-Bozo, Lorenzo; Valdés-González, Héctor; Salazar, José Luis; Muscat, Anthony J; Estévez, L. Antonio; Suleiman, David.

In: Journal of Supercritical Fluids, Vol. 90, 2014, p. 134-143.

Research output: Contribution to journalArticle

Vyhmeister, Eduardo ; Reyes-Bozo, Lorenzo ; Valdés-González, Héctor ; Salazar, José Luis ; Muscat, Anthony J ; Estévez, L. Antonio ; Suleiman, David. / In situ FTIR experimental results in the silylation of low-k films with hexamethyldisilazane dissolved in supercritical carbon dioxide. In: Journal of Supercritical Fluids. 2014 ; Vol. 90. pp. 134-143.
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AU - Salazar, José Luis

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AU - Estévez, L. Antonio

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