In Situ Temperature Measurement during Oxide Chemical Mechanical Planarization

Jesse Cornely, Chris Rogers, Vincent Manno, Ara Philipossian

Research output: Contribution to journalConference articlepeer-review

3 Scopus citations
Original languageEnglish (US)
Pages (from-to)33-46
Number of pages14
JournalMaterials Research Society Symposium - Proceedings
Volume767
DOIs
StatePublished - Jan 1 2003
EventChemical-Mechanical Planarization - San Francisco, CA, United States
Duration: Apr 22 2003Apr 24 2003

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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