Inhibition of alumina deposition during tungsten chemical mechanical planarization through the use of citric acid

Lianyang Zhang, Srini Raghavan, S. Meikle, G. Hudson

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

The beneficial effects of citric acid in inhibiting alumina particle deposition onto silica areas during tungsten chemical mechanical planarization were investigated. The electrokinetics of alumina in the presence of citric acid and the uptake of citric acid by alumina were studied experimentally. At a pH of 4, as the citric acid concentration was increased, the zeta potential of alumina became less positive and reversed sign. Slurry dip tests and small-scale polishing experiments were carried out and the surface cleanliness of contaminated oxide surfaces was characterized with a field emission scanning electron microscope and image analysis. It has been demonstrated that citric acid is very effective in controlling alumina contamination on oxide surfaces when added into the slurry. Electrochemical tests showed that citric acid does not significantly attack tungsten films. A mechanism for the interaction between citric acid and alumina particles has been proposed.

Original languageEnglish (US)
Pages (from-to)1442-1447
Number of pages6
JournalJournal of the Electrochemical Society
Volume146
Issue number4
DOIs
StatePublished - Apr 1999

Fingerprint

Tungsten
Chemical mechanical polishing
Aluminum Oxide
citric acid
Citric acid
Citric Acid
tungsten
Alumina
aluminum oxides
Oxides
cleanliness
oxides
electrokinetics
Zeta potential
Polishing
image analysis
polishing
Silicon Dioxide
Field emission
Image analysis

ASJC Scopus subject areas

  • Electrochemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Inhibition of alumina deposition during tungsten chemical mechanical planarization through the use of citric acid. / Zhang, Lianyang; Raghavan, Srini; Meikle, S.; Hudson, G.

In: Journal of the Electrochemical Society, Vol. 146, No. 4, 04.1999, p. 1442-1447.

Research output: Contribution to journalArticle

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