Insights into tungsten chemical mechanical planarization: Part II. Effect of pad surface micro-texture on frictional, thermal and kinetic aspects of the process

Juan Cristobal Mariscal, Jeffrey McAllister, Yasa Sampurno, Jon Sierra Suarez, Leonard Borucki, Ara Philipossian

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

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Engineering & Materials Science

Chemical Compounds