Insights into tungsten chemical mechanical planarization: Part III. Mini-marathons and associated numerical simulations

Juan Cristobal Mariscal, Jeffrey McAllister, Yasa Sampurno, Jon Sierra Suarez, Leonard Borucki, Ara Philipossian

Research output: Contribution to journalArticle

Abstract

The effects of different types of conditioners (i.e. conventional vs. CVD-coated) on the evolution of frictional, thermal, and kinetic aspects of the tungsten chemical mechanical planarization (CMP) was investigated. Two types of conditioning discs were used to conduct mini-marathons. Due to its more aggressive nature, the conventional disc was able to result in steady values of coefficient of friction (0.438) and blanket tungsten removal rate (253 nm/min) throughout the mini-marathon. In contrast, the CVD-coated disc resulted in a significant decay in coefficient of friction (from 0.440 to 0.373) as the mini-marathon progressed. At the same time, removal rates also dropped from 286 to 246 nm/min. The decays observed with CVD-coated disc were likely due to its gentle nature and thus in its inability to remove reaction by-products as they got generated during repeated polishing. This hypothesis was confirmed by performing a mini-marathon with a much less chemically active slurry which did not cause any decays in polish metrics. Since mechanical effects were previously found to be rate-limiting, Preston’s equation was able to adequately simulate the removal rates and their trends for each and every wafer polished during the mini-marathons.

Original languageEnglish (US)
Pages (from-to)P3190-P3194
JournalECS Journal of Solid State Science and Technology
Volume8
Issue number5
DOIs
StatePublished - Jan 1 2019

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Tungsten
Chemical mechanical polishing
Chemical vapor deposition
Computer simulation
Friction
Industrial Oils
Polishing
Byproducts
Kinetics

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Insights into tungsten chemical mechanical planarization : Part III. Mini-marathons and associated numerical simulations. / Mariscal, Juan Cristobal; McAllister, Jeffrey; Sampurno, Yasa; Suarez, Jon Sierra; Borucki, Leonard; Philipossian, Ara.

In: ECS Journal of Solid State Science and Technology, Vol. 8, No. 5, 01.01.2019, p. P3190-P3194.

Research output: Contribution to journalArticle

Mariscal, Juan Cristobal ; McAllister, Jeffrey ; Sampurno, Yasa ; Suarez, Jon Sierra ; Borucki, Leonard ; Philipossian, Ara. / Insights into tungsten chemical mechanical planarization : Part III. Mini-marathons and associated numerical simulations. In: ECS Journal of Solid State Science and Technology. 2019 ; Vol. 8, No. 5. pp. P3190-P3194.
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