Instantaneous fluid film imaging in chemical mechanical planarization

Daniel Apone, Caprice Gray, Chris Rogers, Vincent P. Manno, Chris Barns, Mansour Moinpour, Sriram Anjur, Ara Philipossian

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Dual Emission Laser Induced Fluorescence (DELIF) is employed to attempt to experimentally determine the nature of the lubrication regime in Chemical Mechanical Planarization. Our DELIF setup provides images of the polishing slurry between the wafer and pad. Static images were taken to provide a baseline, then dynamic runs were conducted. Analyzing these images shows that the wafer only contacts the pad in a small number of places around the wafer, mainly due to the pad's topography.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium Proceedings
EditorsA. Kumar, J.A. Lee, Y.S. Obeng, I. Vos, E.C. Johns
Pages167-173
Number of pages7
Volume867
StatePublished - 2005
Event2005 Materials Research Society Spring Meeting - San Francisco, CA, United States
Duration: Mar 28 2005Mar 31 2005

Other

Other2005 Materials Research Society Spring Meeting
CountryUnited States
CitySan Francisco, CA
Period3/28/053/31/05

Fingerprint

Chemical mechanical polishing
Fluorescence
Imaging techniques
Fluids
Lasers
Polishing
Topography
Lubrication

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Apone, D., Gray, C., Rogers, C., Manno, V. P., Barns, C., Moinpour, M., ... Philipossian, A. (2005). Instantaneous fluid film imaging in chemical mechanical planarization. In A. Kumar, J. A. Lee, Y. S. Obeng, I. Vos, & E. C. Johns (Eds.), Materials Research Society Symposium Proceedings (Vol. 867, pp. 167-173). [W2.3]

Instantaneous fluid film imaging in chemical mechanical planarization. / Apone, Daniel; Gray, Caprice; Rogers, Chris; Manno, Vincent P.; Barns, Chris; Moinpour, Mansour; Anjur, Sriram; Philipossian, Ara.

Materials Research Society Symposium Proceedings. ed. / A. Kumar; J.A. Lee; Y.S. Obeng; I. Vos; E.C. Johns. Vol. 867 2005. p. 167-173 W2.3.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Apone, D, Gray, C, Rogers, C, Manno, VP, Barns, C, Moinpour, M, Anjur, S & Philipossian, A 2005, Instantaneous fluid film imaging in chemical mechanical planarization. in A Kumar, JA Lee, YS Obeng, I Vos & EC Johns (eds), Materials Research Society Symposium Proceedings. vol. 867, W2.3, pp. 167-173, 2005 Materials Research Society Spring Meeting, San Francisco, CA, United States, 3/28/05.
Apone D, Gray C, Rogers C, Manno VP, Barns C, Moinpour M et al. Instantaneous fluid film imaging in chemical mechanical planarization. In Kumar A, Lee JA, Obeng YS, Vos I, Johns EC, editors, Materials Research Society Symposium Proceedings. Vol. 867. 2005. p. 167-173. W2.3
Apone, Daniel ; Gray, Caprice ; Rogers, Chris ; Manno, Vincent P. ; Barns, Chris ; Moinpour, Mansour ; Anjur, Sriram ; Philipossian, Ara. / Instantaneous fluid film imaging in chemical mechanical planarization. Materials Research Society Symposium Proceedings. editor / A. Kumar ; J.A. Lee ; Y.S. Obeng ; I. Vos ; E.C. Johns. Vol. 867 2005. pp. 167-173
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