Instantaneous fluid film imaging in chemical mechanical planarization

Daniel Apone, Caprice Gray, Chris Rogers, Vincent P. Manno, Chris Barns, Mansour Moinpour, Sriram Anjur, Ara Philipossian

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

Dual Emission Laser Induced Fluorescence (DELIF) is employed to attempt to experimentally determine the nature of the lubrication regime in Chemical Mechanical Planarization. Our DELIF setup provides images of the polishing slurry between the wafer and pad. Static images were taken to provide a baseline, then dynamic runs were conducted. Analyzing these images shows that the wafer only contacts the pad in a small number of places around the wafer, mainly due to the pad's topography.

Original languageEnglish (US)
Article numberW2.3
Pages (from-to)167-173
Number of pages7
JournalMaterials Research Society Symposium Proceedings
Volume867
StatePublished - Dec 1 2005
Event2005 Materials Research Society Spring Meeting - San Francisco, CA, United States
Duration: Mar 28 2005Mar 31 2005

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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