Insulating ultrathin silica films formed by a room-temperature sol-gel process

J. W. Robertson, M. Cai, Jeanne E Pemberton

Research output: Contribution to journalArticle

22 Scopus citations

Abstract

Sol-gel ultrathin dielectric surfaces were derived without high-temperature annealing step. The surfaces exhibit good electronic properties, high resistivities and intrinsically low capacitances.

Original languageEnglish (US)
Pages (from-to)662-667
Number of pages6
JournalAdvanced Materials
Volume13
Issue number9
DOIs
Publication statusPublished - May 3 2001

    Fingerprint

ASJC Scopus subject areas

  • Materials Science(all)

Cite this