Integrated micro thermal sensors for local temperature measurements in microsystems

L. Jiang, Y. Wang, M. Wong, Yitshak Zohar

Research output: Chapter in Book/Report/Conference proceedingChapter

1 Citation (Scopus)

Abstract

An array of integrated thermal micro sensors was successfully designed, fabricated and characterized for the measurement of temperature distributions in forced convection microchannel flows. Polycrystalline microsensors with the size of 4μmx4μmx0.4μm were suspended across the micro-channels, with hydraulic diameters of less than 3μm, directly exposed to the fluid for local temperature measurements. The fabrication of the integrated microsystem was accomplished using surface micromachining techniques. The sensor sensitivity, time response, accuracy and long term stability are documented. A theoretical analysis of the sensor performance, as part of an integrated microsystem, is presented to provide a framework for the interpretation of the experimental results.

Original languageEnglish (US)
Title of host publicationProceedings of the 1999 3rd ASME/JSME Joint Fluids Engineering Conference, FEDSM'99, San Francisco, California, USA, 18-23 July 1999 (CD-ROM)
PublisherAmerican Society of Mechanical Engineers
Pages1
Number of pages1
ISBN (Print)0791819612
StatePublished - 1999
Externally publishedYes

Fingerprint

Microsystems
Temperature measurement
sensor
Sensors
Surface micromachining
Microsensors
temperature
Forced convection
Microchannels
Temperature distribution
convection
Hydraulics
hydraulics
Fabrication
Fluids
fluid
Hot Temperature

ASJC Scopus subject areas

  • Earth and Planetary Sciences(all)
  • Engineering(all)
  • Environmental Science(all)

Cite this

Jiang, L., Wang, Y., Wong, M., & Zohar, Y. (1999). Integrated micro thermal sensors for local temperature measurements in microsystems. In Proceedings of the 1999 3rd ASME/JSME Joint Fluids Engineering Conference, FEDSM'99, San Francisco, California, USA, 18-23 July 1999 (CD-ROM) (pp. 1). American Society of Mechanical Engineers.

Integrated micro thermal sensors for local temperature measurements in microsystems. / Jiang, L.; Wang, Y.; Wong, M.; Zohar, Yitshak.

Proceedings of the 1999 3rd ASME/JSME Joint Fluids Engineering Conference, FEDSM'99, San Francisco, California, USA, 18-23 July 1999 (CD-ROM). American Society of Mechanical Engineers, 1999. p. 1.

Research output: Chapter in Book/Report/Conference proceedingChapter

Jiang, L, Wang, Y, Wong, M & Zohar, Y 1999, Integrated micro thermal sensors for local temperature measurements in microsystems. in Proceedings of the 1999 3rd ASME/JSME Joint Fluids Engineering Conference, FEDSM'99, San Francisco, California, USA, 18-23 July 1999 (CD-ROM). American Society of Mechanical Engineers, pp. 1.
Jiang L, Wang Y, Wong M, Zohar Y. Integrated micro thermal sensors for local temperature measurements in microsystems. In Proceedings of the 1999 3rd ASME/JSME Joint Fluids Engineering Conference, FEDSM'99, San Francisco, California, USA, 18-23 July 1999 (CD-ROM). American Society of Mechanical Engineers. 1999. p. 1
Jiang, L. ; Wang, Y. ; Wong, M. ; Zohar, Yitshak. / Integrated micro thermal sensors for local temperature measurements in microsystems. Proceedings of the 1999 3rd ASME/JSME Joint Fluids Engineering Conference, FEDSM'99, San Francisco, California, USA, 18-23 July 1999 (CD-ROM). American Society of Mechanical Engineers, 1999. pp. 1
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