Integration of metal-oxide nanobelts with microsystems for sensor applications

Choongho Yu, Qing Hao, Li Shi, Xiangyang Kong, Z. L. Wang

Research output: Contribution to journalConference article

1 Scopus citations

Abstract

Single-crystalline tin dioxide (SnO 2) nanobelts have been assembled with microfabricated suspended heaters as low-power, sensitive gas sensors. With less than 4 mW power consumption of the micro-heater, the nanobelt can be heated up to 500°C. The electrical conductance of the heated nanobelt was found to be highly stable and sensitive to toxic and inflammable gas species including dimethyl methyl phosphonate (DMMP), nitrogen dioxide (NO 2), and ethanol. The experiment is a step towards the large scale integration of nanomaterials with microsystems, and such integration via a directed assembly approach can potentially enable the fabrication of low-power, sensitive, and selective integrated nanosensor systems.

Original languageEnglish (US)
Article number23
Pages (from-to)144-151
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5593
DOIs
StatePublished - 2004
Externally publishedYes
EventNanosensing Materials and Devices - Philadelphia, PA, United States
Duration: Oct 25 2004Oct 28 2004

Keywords

  • Dielectrophoresis
  • Ethanol
  • Gas sensors
  • Integration
  • Metal oxide
  • Microsystems
  • NO
  • Nanobelt
  • Nanosensors
  • Poisoning

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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