Abstract
Moisture impurity adsorption and desorption from anodized aluminum layers was studied using atmospheric pressure ionization and electron-impact ionization mass spectroscopic techniques. In this work, one inch OD tubular samples (Sample A) from a major semiconductor tool manufacturer and 1 inch×4 inches×1/8 inch flat coupon samples (Sample B) from a company who specializes anodizing processes were studied. Strong moisture interaction with porous anodized aluminum layers was observed in the work.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 463-467 |
| Number of pages | 5 |
| Journal | Institute of Environmental Sciences - Proceedings, Annual Technical Meeting |
| State | Published - Dec 1 1995 |
| Event | Proceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences - Anaheim, CA, USA Duration: Apr 30 1995 → May 5 1995 |
ASJC Scopus subject areas
- Environmental Engineering