Interactions of moisture impurity on anodized aluminum

Ce Ma, Eric Shero, Stephen L. Gilbert, Farhang Shadman

Research output: Contribution to journalConference article

Abstract

Moisture impurity adsorption and desorption from anodized aluminum layers was studied using atmospheric pressure ionization and electron-impact ionization mass spectroscopic techniques. In this work, one inch OD tubular samples (Sample A) from a major semiconductor tool manufacturer and 1 inch×4 inches×1/8 inch flat coupon samples (Sample B) from a company who specializes anodizing processes were studied. Strong moisture interaction with porous anodized aluminum layers was observed in the work.

Original languageEnglish (US)
Pages (from-to)463-467
Number of pages5
JournalInstitute of Environmental Sciences - Proceedings, Annual Technical Meeting
StatePublished - Dec 1 1995
EventProceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences - Anaheim, CA, USA
Duration: Apr 30 1995May 5 1995

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ASJC Scopus subject areas

  • Environmental Engineering

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