Interactions of moisture impurity on anodized aluminum

Ce Ma; Eric Shero; Stephen L. Gilbert; Farhang Shadman

Interactions of moisture impurity on anodized aluminum

Ce Ma, Eric Shero, Stephen L. Gilbert, Farhang Shadman

Chemical and Environmental Engineering

Research output: Contribution to journal › Conference article › peer-review

Abstract

Moisture impurity adsorption and desorption from anodized aluminum layers was studied using atmospheric pressure ionization and electron-impact ionization mass spectroscopic techniques. In this work, one inch OD tubular samples (Sample A) from a major semiconductor tool manufacturer and 1 inch×4 inches×1/8 inch flat coupon samples (Sample B) from a company who specializes anodizing processes were studied. Strong moisture interaction with porous anodized aluminum layers was observed in the work.

Original language	English (US)
Pages (from-to)	463-467
Number of pages	5
Journal	Institute of Environmental Sciences - Proceedings, Annual Technical Meeting
State	Published - Dec 1 1995
Event	Proceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences - Anaheim, CA, USA Duration: Apr 30 1995 → May 5 1995

ASJC Scopus subject areas

Environmental Engineering

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title = "Interactions of moisture impurity on anodized aluminum",

abstract = "Moisture impurity adsorption and desorption from anodized aluminum layers was studied using atmospheric pressure ionization and electron-impact ionization mass spectroscopic techniques. In this work, one inch OD tubular samples (Sample A) from a major semiconductor tool manufacturer and 1 inch×4 inches×1/8 inch flat coupon samples (Sample B) from a company who specializes anodizing processes were studied. Strong moisture interaction with porous anodized aluminum layers was observed in the work.",

author = "Ce Ma and Eric Shero and Gilbert, {Stephen L.} and Farhang Shadman",

year = "1995",

month = dec,

day = "1",

language = "English (US)",

pages = "463--467",

journal = "Institute of Environmental Sciences - Proceedings, Annual Technical Meeting",

issn = "0073-9227",

note = "Proceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences ; Conference date: 30-04-1995 Through 05-05-1995",

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TY - JOUR

T1 - Interactions of moisture impurity on anodized aluminum

AU - Ma, Ce

AU - Shero, Eric

AU - Gilbert, Stephen L.

AU - Shadman, Farhang

PY - 1995/12/1

Y1 - 1995/12/1

N2 - Moisture impurity adsorption and desorption from anodized aluminum layers was studied using atmospheric pressure ionization and electron-impact ionization mass spectroscopic techniques. In this work, one inch OD tubular samples (Sample A) from a major semiconductor tool manufacturer and 1 inch×4 inches×1/8 inch flat coupon samples (Sample B) from a company who specializes anodizing processes were studied. Strong moisture interaction with porous anodized aluminum layers was observed in the work.

AB - Moisture impurity adsorption and desorption from anodized aluminum layers was studied using atmospheric pressure ionization and electron-impact ionization mass spectroscopic techniques. In this work, one inch OD tubular samples (Sample A) from a major semiconductor tool manufacturer and 1 inch×4 inches×1/8 inch flat coupon samples (Sample B) from a company who specializes anodizing processes were studied. Strong moisture interaction with porous anodized aluminum layers was observed in the work.

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M3 - Conference article

AN - SCOPUS:0029543789

SP - 463

EP - 467

JO - Institute of Environmental Sciences - Proceedings, Annual Technical Meeting

JF - Institute of Environmental Sciences - Proceedings, Annual Technical Meeting

SN - 0073-9227

T2 - Proceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences

Y2 - 30 April 1995 through 5 May 1995

ER -