Investigation of diamond grit size and conditioning force effect on CMP pads topography

Sun Ting, Leonard Borucki, Zhuang Yun, Ara Philipossian

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

In this study, incremental loading and interferometry analysis were performed on Rohm and Haas IC1000 plain pad surfaces to investigate the effects of diamond size and conditioning force on pad topography. The Rohm and Haas IC1000 plain pad was conditioned by Mitsubishi Materials Corporation 100-grit and 325-grit diamond discs under 3.6 and 8.0 lb. Two pad samples were taken for each disc and each conditioning force test. For each pad sample, a custom-made incremental loading device (ILD) was used to measure pad surface mechanical response under different loads. When loads were applied to the pad sample surface, the pad surface displacement was measured. A decay length was extracted from the log plot of the pressure ratio vs. the change in pad surface displacement. The decay length generally increased with the diamond size and conditioning force. Both dry and wet pad samples were analyzed by the incremental loading device. Results showed that wet pad samples had higher decay lengths than dry pad samples. Separately, optical interferometry was used to probe dry pad sample surfaces without contact and produce surface height probability density functions (PDFs). For all pad samples, the pad surface height PDFs exhibited an exponential tail and a decay length was extracted, which represented the distance over which the pad surface height probability dropped by a factor of 1/e. The decay lengths extracted from the optical interferometry analysis were consistent with those extracted from the incremental loading experiments, indicating that the optically measurable pad surface characteristic had a practical interpretation in terms of the pad surface mechanical response.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium Proceedings
Pages45-49
Number of pages5
Volume991
Publication statusPublished - 2007
Event2007 MRS Spring Meeting - San Francisco, CA, United States
Duration: Apr 10 2007Apr 12 2007

Other

Other2007 MRS Spring Meeting
CountryUnited States
CitySan Francisco, CA
Period4/10/074/12/07

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Ting, S., Borucki, L., Yun, Z., & Philipossian, A. (2007). Investigation of diamond grit size and conditioning force effect on CMP pads topography. In Materials Research Society Symposium Proceedings (Vol. 991, pp. 45-49)